1. Makina ophikira a cathode ion opanda kanthu ndi makina ophikira a ion a arc ion otentha
Mfuti ya cathode yopanda kanthu ndi mfuti ya arc ya waya wotentha zimayikidwa pamwamba pa chipinda chophikira, anode imayikidwa pansi, ndipo ma coil awiri a electromagnetic amayikidwa pamwamba ndi pansi pa chipinda chophikira. Ma electron a kuwala kwa Arc amayenda kuchokera pamwamba kupita pansi kuti achite kayendedwe ka mzere wozungulira.
2. Maginito okhazikika komanso kulamulira kwa maginito amagetsi kwa gwero laling'ono lozungulira la cathode arc
Chozungulira chamagetsi chimafulumizitsa malo ozungulira kuti chizizungulira cholinga, zomwe zimachepetsa nthawi yokhalapo kwa malo ozungulira pamalo ozungulira, zimachepetsa malo a dziwe losungunuka ndikukonza kapangidwe ka filimu.
3.Dual electromagnetic control cathodic arc source
Gwero la cathodic arc lili ndi ma coil awiri a electromagnetic, omwe amawongolera liwiro lozungulira la kuyenda kwa ma electron ndikukonza kapangidwe ka filimu.
4. Magnetron Cyclotron PECVD
Ma coil awiri amagetsi amayikidwa kunja kwa chipinda chophikira cha DC PECVD kuti ma elekitironi azizungulira, zomwe zimawonjezera mwayi woti ma elekitironi ndi mpweya zigunde, komanso zimawonjezera kugawanika kwa tinthu tating'onoting'ono mu filimu.
5.ECR Microwave PECVD
Mu chipinda chophikira kunja, chapamwamba ndi chapansi chomwe chili ndi ma coil awiri amagetsi, chingathandize kuchepetsa kugawanika kwa ma coil.
6. Kutulutsa kwa Arc Light PECVD
Mu chipinda chophikira cha zida za PECVD chotulutsa arc discharge mozungulira kuyika kwapamwamba ndi pansi kwa ma coil awiri amagetsi, kuyika kwa filimu ya diamondi, munda wa coaxial electromagnetic ukhoza kuzunguliridwa ndi kuyenda kwa arc electron kuti mulimbikitse ionization ya mpweya wa ma hydrocarbon.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Okutobala-24-2023