1. Umshini wokumboza we-cathode ion ongenalutho kanye nomshini wokumboza we-arc ion wezintambo ezishisayo
Isibhamu se-cathode esingenalutho kanye nesibhamu se-arc esishisayo sifakwe phezulu kwegumbi lokumboza, i-anode ifakwe ngezansi, futhi amakhoyili amabili kagesi afakwe phezulu nangaphansi kwe-periphery yegumbi lokumboza. I-electron ekhanyayo ye-arc igeleza ukusuka phezulu iye phansi ukwenza ukunyakaza komugqa ovunguzayo.
2. Uzibuthe waphakade kanye nokulawula kazibuthe kagesi komthombo omncane oyindilinga we-cathode arc
Ikhoyili kazibuthe kagesi isheshisa indawo ye-arc ukuze yenze ukunyakaza okujikelezayo kusiyingi sethagethi, enciphisa isikhathi sokuhlala sendawo ye-arc endaweni eqondiwe, yehlise indawo yechibi elincibilikisiwe futhi icwenge ukuhlelwa kongqimba lwefilimu.
3.Dual electromagnetic control cathodic arc umthombo
Umthombo we-cathodic arc ufakwe amakhoyili amabili kagesi, athuthukisa isivinini sokujikeleza kokugeleza kwama-electron futhi acwengisise inhlangano yesendlalelo sefilimu.
4.Magnetron Cyclotron PECVD
Amakhoyili amabili kagesi afakwe ngaphandle kwegumbi lokuhlanganisa le-DC PECVD ukuze enze ama-electron ajikeleze, okwandisa amathuba okushayisana phakathi kwama-electron negesi, futhi kuthuthukisa izinga lokuhlukaniswa kwezinhlayiya ezisesendlaleni sefilimu.
5.ECR Microwave PECVD
Ekamelweni enamathela ngaphandle efakwe phezulu naphansi ngamakhoyili amabili kagesi kagesi, kungathuthukisa izinga lokuhlukanisa.
I-6.Arc Light Discharge PECVD
Ku-arc discharge PECVD Igumbi lokumboza lemishini ezungeze ukufakwa okuphezulu naphansi kwamakhoyili amabili kagesi, ukubekwa kwefilimu yedayimane, insimu ye-coaxial electromagnetic ingajikeleziswa ukugeleza kwe-arc electron ukuze kushukumise i-ionization yegesi yama-hydrocarbon.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Oct-24-2023