1. Umatshini wokugquma we-ion cathode kunye nomatshini wokugquma we-arc ion wocingo olushushu
Umpu we-cathode ongenanto kunye nompu oshushu we-arc ufakwe phezulu kwegumbi lokugubungela, i-anode ifakwe ezantsi, kwaye iikhoyili ezimbini ze-electromagnetic zifakwe phezulu nasezantsi kwi-periphery yegumbi lokugubungela. I-electron yokukhanya ye-arc ihamba ukusuka phezulu ukuya ezantsi ukwenza intshukumo yomgca ojikelezayo.
2. Imagnethi esisigxina kunye nolawulo lwe-electromagnetic yomthombo omncinci wecathode arc arc
Ikhoyili ye-electromagnetic ikhawulezisa indawo ye-arc ukwenza intshukumo ejikelezayo kwisangqa sethagethi, enciphisa ixesha lokuhlala lendawo ye-arc kwindawo ekujoliswe kuyo, inciphisa indawo yedama elinyibilikisiweyo kwaye icokise umbutho wefilimu.
3.Dual electromagnetic ulawulo cathodic arc umthombo
Umthombo we-cathodic arc uxhotyiswe ngeekhoyili ezimbini ze-electromagnetic, eziphucula isantya sokujikeleza kokuhamba kwe-electron kunye nokucoca umbutho wefilimu.
4.Magnetron Cyclotron PECVD
Iikhoyili ezimbini ze-electromagnetic zifakwe ngaphandle kwe-DC PECVD yokugubungela igumbi ukwenza ii-electron zijikeleze, okwandisa amathuba okungqubana phakathi kwee-electron kunye negesi, kunye nokuphucula izinga lokuqhawula amasuntswana kungqimba lwefilimu.
5.ECR Microwave PECVD
Kwigumbi lokugquma ngaphandle elifakwe phezulu nasezantsi kunye neekhoyili ezimbini ze-electromagnetic, kunokuphucula izinga lokuqhawula.
6.Arc Light Discharge PECVD
Kwi-arc yokukhupha i-PECVD yezixhobo zokugquma igumbi elijikeleze ukufakwa okuphezulu nangaphantsi kweekhoyili ezimbini ze-electromagnetic, ukubekwa kwefilimu yedayimani, intsimi ye-coaxial electromagnetic inokujikelezwa ukuhamba kwe-electron ye-arc ukuvuselela i-ionization yegesi ye-hydrocarbons.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Oct-24-2023