1. Hollow cathode ion coating machine uye inopisa waya arc ion coating machine
Iyo hollow cathode pfuti uye inopisa waya arc pfuti yakaiswa pamusoro pekamuri yekuputira, iyo anode inoiswa pazasi, uye maviri emagetsi coil akaiswa kumusoro uye kuzasi kwekamuri yekuputira. Arc light electron inoyerera kubva kumusoro ichienda pasi kuita spiral line movement.
2. Permanent magineti plus electromagnetic control yediki denderedzwa cathode arc source
Iyo electromagnetic coil inomhanyisa iyo arc nzvimbo kuti iite kutenderera kutenderera mudenderedzwa rechinangwa, iyo inoderedza nguva yekugara yearc nzvimbo pane inotarirwa pamusoro, inoderedza nzvimbo yedziva rakanyungudutswa uye inonatsa iyo firimu layer yesangano.
3.Dual electromagnetic control cathodic arc source
Iyo cathodic arc sosi yakashongedzerwa maviri emagetsi coils, ayo anovandudza kutenderera kwekutenderera kweelectron kuyerera uye kunatsa iyo firimu layer sangano.
4.Magnetron Cyclotron PECVD
Makoiri maviri emagetsi anoiswa kunze kweDC PECVD coating chamber kuita kuti maerekitironi atenderere, izvo zvinowedzera mukana wekudhumhana pakati pemaerekitironi negasi, uye zvinonatsiridza mwero wekuparadzaniswa kwezvikamu zviri muchikamu chefirimu.
5.ECR Microwave PECVD
Mukamuri yekuputira kunze kweiyo yakaiswa yepamusoro uye yakaderera ine maviri emagetsi coil, inogona kuvandudza chiyero chekuparadzanisa.
6.Arc Light Discharge PECVD
Muarc discharge PECVD midziyo yekuputira yakatenderedza kumusoro uye kuzasi kuisirwa maviri emagetsi coil, kuiswa kwedhaimani firimu, iyo coaxial electromagnetic munda inogona kutenderedzwa arc electron kuyerera kukurudzira gasi ionization yemahydrocarbons.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Oct-24-2023