Coaxial electromagnetic yumurima wubwoko bwa ion coating

1. Imashini itwikiriye cathode ion hamwe nimashini ishyushye arc ion

Imbunda ya cathode yuzuye hamwe nimbunda zishyushye arc zashyizwe hejuru yicyumba cyo gutwikamo, anode ishyirwa hepfo, naho amashanyarazi abiri ya elegitoronike ashyirwa hejuru no hepfo yicyumba cyo hejuru. Arc yoroheje electron itemba kuva hejuru kugera hepfo kugirango ikore umurongo uzenguruka.

2. Magneti ahoraho wongeyeho electromagnetic igenzura ntoya izenguruka cathode arc isoko

Igikoresho cya electromagnetic yihutisha ikibanza cya arc kugirango kizenguruke kizengurutse intego, kigabanya igihe cyo gutura cya arc ahantu hejuru yintego, kigabanya ubuso bwa pisine yashongeshejwe kandi inonosora imitunganyirize ya firime.

3.Ibikoresho bibiri bya electromagnetic igenzura cathodic arc isoko

Inkomoko ya cathodic arc ifite ibikoresho bibiri bya elegitoroniki ya electronique, itezimbere umuvuduko wo kuzenguruka kwa electron kandi ikanonosora imitunganyirize ya firime.

4.Magnetron Cyclotron PECVD

Amashanyarazi abiri ya electromagnetic yashyizwe hanze yicyumba cya DC PECVD kugirango icyumba cya electron kizunguruka, ibyo bikaba byongera amahirwe yo kugongana hagati ya electron na gaze, kandi bikazamura igipimo cyo gutandukana kwingirangingo ziri murwego rwa firime.

5.ECR Microwave PECVD

Mu cyumba cyo gutwikamo hanze yashyizweho hejuru no hepfo hamwe na coil electromagnetic ebyiri, birashobora kuzamura igipimo cyo gutandukana.

6.Arc Gusohora Umucyo PECVD

Mu gusohora arc ibikoresho bya PECVD bitwikiriye icyumba gikikije hejuru no hepfo yo gushyiramo amashanyarazi abiri ya electronique, gushira firime ya diyama, umurima wa coaxial electromagnetic umurima urashobora kuzunguruka arc electron electronique kugirango itere gaze ionisiyasi ya hydrocarbone.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua