1. M cathode ion shafi inji da zafi waya baka ion shafi inji
The m cathode gun da hot waya baka gun an shigar a saman shafi dakin, da anode da aka shigar a kasa, da kuma biyu electromagnetic coils da aka shigar a sama da kasa na shafi ɗakin periphery. Arc hasken lantarki yana gudana daga sama zuwa ƙasa don yin motsin layi mai karkace.
2. Dindindin maganadisu da electromagnetic iko na kananan madauwari cathode baka tushen
Coil na lantarki yana haɓaka tabo na baka don yin motsi na jujjuyawar a cikin kewayen abin da ake nufi, wanda ke rage lokacin zama na tabo a kan saman da aka yi niyya, yana rage yanki na narkakken tafkin kuma yana daidaita ƙungiyar fim ɗin.
3.Dual electromagnetic iko cathodic baka tushen
Madogarar baka na cathodic sanye take da coils na lantarki guda biyu, wanda ke inganta saurin jujjuyawar wutar lantarki da kuma sabunta ƙungiyar Layer ɗin fim.
4. Magnetron Cyclotron PECVD
Ana shigar da coils biyu na lantarki a waje da ɗakin murfin DC PECVD don sanya electrons su juya, wanda ke ƙara yuwuwar karo tsakanin electrons da iskar gas, kuma yana haɓaka ƙimar rarrabuwar barbashi a Layer ɗin fim.
5.ECR Microwave PECVD
A cikin ɗakin rufi a waje da shigar babba da ƙananan tare da coils na lantarki guda biyu, na iya inganta ƙimar rarrabawa.
6.Arc Light Discharge PECVD
A cikin arc fitarwa PECVD kayan shafa dakin a kusa da babba da ƙananan shigarwa na biyu electromagnetic coils, ajiya na lu'u-lu'u fim, da coaxial electromagnetic filin za a iya juya baka electron kwarara zuwa ta da gas ionization na hydrocarbons.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Oktoba-24-2023