Ukugqoka kwe-ionumshini kwaqala kusukela kumbono owaphakanyiswa ngu-DM Mattox ngawo-1960, futhi ukuhlolwa okuhambisanayo kwaqala ngaleso sikhathi; Kuze kube ngu-1971, uChambers nabanye bashicilela ubuchwepheshe bokugoba ama-ion nge-electron beam; Ubuchwepheshe be-reactive evaporation plating (ARE) bavezwa embikweni we-Bunshah ngo-1972, lapho izinhlobo zefilimu eziqinile njenge-TiC ne-TiN zakhiqizwa; Futhi ngo-1972, uSmith noMolley bamukela ubuchwepheshe be-hollow cathode enqubweni yokugoba. Ngawo-1980, ukugoba ama-ion eShayina kwase kufinyelele ezingeni lokusetshenziswa kwezimboni, futhi izinqubo zokugoba ezifana nokugoba ama-ion amaningi e-vacuum kanye nokugoba ama-ion e-arc-discharge zase zivele ngokulandelana.
Inqubo yonke yokusebenza kwe-vacuum ion plating imi kanje: okokuqala,iphampuigumbi lokuhlanza, bese kubalindaingcindezi ye-vacuum ibe ngu-4X10 ⁻ ³ Panoma okungcono, kuyadingeka ukuxhuma ugesi we-high voltage bese wakha indawo ye-plasma ephansi yegesi yokukhipha i-low voltage phakathi kwe-substrate kanye ne-evaporator. Xhuma i-substrate electrode nge-5000V DC negative high voltage ukuze kwakhiwe ukukhishwa kwe-glow kwe-cathode. Ama-ion e-inert gas akhiqizwa eduze kwendawo yokukhanya engemihle. Angena endaweni emnyama ye-cathode futhi asheshiswa yinsimu kagesi bese ehlasela ubuso be-substrate. Lena inqubo yokuhlanza, bese engena enkambisweni yokumboza. Ngomphumela wokushisa kwe-bombardment, ezinye izinto zokufaka i-plating ziyashiswa. Indawo ye-plasma ingena kuma-proton, ishayisane nama-electron nama-ion e-inert gas, kanti ingxenye encane yawo i-ionized, Lawa ma-ion ane-ionized anamandla aphezulu azohlasela ubuso befilimu futhi athuthukise ikhwalithi yefilimu ngezinga elithile.
Umgomo wokufaka ama-ion e-vacuum uthi: ekamelweni le-vacuum, kusetshenziswa i-gas discharge phenomenon noma ingxenye ye-ionized yezinto eziphefumulayo, ngaphansi kokubhonjwa kwama-ion noma ama-ion egesi aphefumulayo, kufakwa lezi zinto eziphefumulayo noma ama-reactant azo ngesikhathi esisodwa ku-substrate ukuze kutholakale ifilimu encane. Isembozo sama-ionumshiniIhlanganisa ukuhwamuka kwe-vacuum, ubuchwepheshe be-plasma kanye nokukhishwa kokukhanya kwegesi, okungagcini nje ngokuthuthukisa ikhwalithi yefilimu, kodwa futhi kwandisa ububanzi bokusetshenziswa kwefilimu. Izinzuzo zale nqubo ukusabalala okunamandla, ukunamathela okuhle kwefilimu, kanye nezinto zokugqoka ezahlukahlukene. Umgomo wokufaka ama-ion wahlongozwa okokuqala yi-DM Mattox. Kunezinhlobo eziningi zokufaka ama-ion. Uhlobo oluvame kakhulu ukushisa kokuhwamuka, okuhlanganisa ukushisa kokumelana, ukushisa kwe-electron beam, ukushisa kwe-plasma electron beam, ukushisa kwe-induction okuvama kakhulu kanye nezinye izindlela zokushisa.
Isikhathi sokuthunyelwe: Feb-14-2023