Ni iyihe ngingo ngenderwaho y'imikorere ya mashini ikoresha ibyuma bya Ion?

Igipfukisho cya iyoniimashini byaturutse ku gitekerezo cyatanzwe na DM Mattox mu myaka ya 1960, kandi igerageza rijyanye nabyo ryatangiye icyo gihe; Kugeza mu 1971, Chambers n'abandi basohoye ikoranabuhanga ryo gushyira ion muri electron beam; Ikoranabuhanga rya reactive evaporation plating (ARE) ryagaragajwe muri raporo ya Bunshah mu 1972, ubwo ubwoko bwa filime zikomeye nka TiC na TiN bwakorwaga; Nanone mu 1972, Smith na Molley bakoresheje ikoranabuhanga rya cathode hollow mu gikorwa cyo gusiga. Mu myaka ya 1980, gushyira ion muri China byari bimaze kugera ku rwego rwo gukoreshwa mu nganda, kandi inzira zo gusiga nka vacuum multi-arc ion plating na arc-discharge ion plating zagaragaye zikurikiranye.

Uburyo bwose bwo gukora irangi ry'ingufu (vacuum ion plating) ni ubu bukurikira: icya mbere,pompeicyumba cy'ubusamo, hanyumategerezaumuvuduko w'umwuka uvamo umwuka ugera kuri 4X10 ⁻ ³ Pacyangwa byiza kurushaho, ni ngombwa guhuza ingufu z'amashanyarazi zikoresha ingufu nyinshi no kubaka agace ka plasma gafite ubushyuhe buke bwa gaze isohora ingufu nke hagati y'agace ka substrate n'icyuma gishyushya. Huza electrode ya substrate na voltage nyinshi ya 5000V DC kugira ngo habeho urumuri rusohoka rwa cathode. Ion za gaze zitagira ingufu zikorwa hafi y'agace ka negative. Zinjira mu gace ka cathode kijimye kandi zigahutishwa n'amashanyarazi hanyuma zigatera hejuru y'agace ka substrate. Iyi ni inzira yo gusukura, hanyuma zikinjira mu buryo bwo gutwikira. Binyuze mu ngaruka zo gushyushya hakoreshejwe bombardment, bimwe mu bikoresho byo gutwikira birahinduka umwuka. Agace ka plasma kinjira muri proton, kigahura na electron na ion za gaze zitagira ingufu, kandi igice gito cyabyo gihinduka ioni, Izi ion zikoresha ingufu nyinshi zizatera hejuru y'agace ka filime kandi zinoze ubwiza bwa filime ku rugero runaka.

Ihame ryo gushyira irangi ry’imvange ni: mu cyumba cy’imvange, hakoreshejwe ikintu cyo gusohora imyuka cyangwa igice cyayo cyayo cyayo, munsi y’imbunda zayo cyangwa imvange zayo, zishyira icyarimwe ibyo bintu byayo byayo cyangwa reactants zayo ku gice cy’ubutaka kugira ngo haboneke agahu gato. Irangi rya iyoniimashiniIhuza imyuka ivamo umwuka, ikoranabuhanga rya plasma n'isohoka ry'umwuka ushyushye, ibyo bikaba bidatuma filime irushaho kuba nziza gusa, ahubwo binanongera uburyo filime ikoreshwamo. Ibyiza by'iyi nzira ni ugukwirakwiza cyane, gufata neza filime, n'ibikoresho bitandukanye byo gusiga. Ihame ryo gushyira ion mu cyuma ryatanzwe bwa mbere na DM Mattox. Hariho ubwoko bwinshi bwo gushyira ion mu cyuma. Ubwoko bukunze gukoreshwa cyane ni ugushyushya mu cyuma, harimo gushyushya mu cyuma, gushyushya mu cyuma, gushyushya mu cyuma, gushyushya mu cyuma, gushyushya mu cyuma n'ubundi buryo bwo gushyushya.