Kuputira kweIonmuchina Yakatangira padzidziso yakataurwa naDM Mattox muma1960, uye kuyedza kwakafanana kwakatanga panguva iyoyo; Kusvika muna 1971, Chambers nevamwe vakaburitsa tekinoroji ye electron beam ion plating; Tekinoroji ye reactive evaporation plating (ARE) yakaratidzwa muBunshah report muna 1972, apo mhando dzemafirimu akaomarara akadai seTiC neTiN dzakagadzirwa; Zvakare muna 1972, Smith naMolley vakatora tekinoroji ye hollow cathode mu coating process. Pakazosvika makore ekuma1980, ion plating muChina yakanga yasvika padanho rekushandiswa mumaindasitiri, uye maitiro e coating akadai se vacuum multi-arc ion plating uye arc-discharge ion plating akanga aonekwa zvichitevedzana.
Maitiro ese ekushanda kwe vacuum ion plating ndeekuti: chekutanga,pombiimba yekuputira vacuum, uye ipapomirirakumanikidzwa kwevacuum kusvika ku4X10 ⁻ ³ Pakana zviri nani, zvinodikanwa kubatanidza simba remagetsi ane voltage yakakwira uye kuvaka nzvimbo yeplasma ine tembiricha yakaderera yegesi inoburitsa magetsi yakaderera pakati pe substrate ne evaporator. Batanidza electrode ye substrate ne 5000V DC negative high voltage kuti igadzire kuburitsa kwe cathode. Ma ions egasi asina simba anogadzirwa pedyo nenzvimbo ine negative glow. Anopinda munzvimbo ine cathode dark uye anokurumidziswa ne electric field uye anoputira pamusoro pe substrate. Iyi inzira yekuchenesa, uye obva apinda mu coating process. Kuburikidza nemhedzisiro ye bombardment heating, zvimwe zvinhu zve plating zvinopiswa. Nzvimbo ye plasma inopinda muma proton, inobonderana nema electron nema ions egasi asina simba, uye chikamu chidiki chazvo chinopisirwa, ma ions aya ane ionized ane simba rakawanda achaputira pamusoro pefirimu uye anovandudza kunaka kwefirimu kusvika pamwero wakati.
Nheyo yekuisa maion evacuum cleaning ndeiyi: mukamuri revacuum, uchishandisa gasi rinoburitsa kana chikamu cheioni chezvinhu zvakapiswa, pasi pekuputirwa kwemaion ezvinhu zvakapiswa kana maion egasi, panguva imwe chete vanoisa zvinhu izvi zvakapiswa kana reactants yazvo pa substrate kuti vawane firimu rakatetepa. Kuvhara kwemaionmuchinaInosanganisa vacuum evaporation, plasma technology uye gas glow discharge, izvo zvisingangogadzirise kunaka kwefirimu chete, asiwo zvinowedzera huwandu hwekushandiswa kwefirimu. Zvakanakira zveiyi nzira ndeye diffraction yakasimba, kunamira zvakanaka kwefirimu, uye zvinhu zvakasiyana-siyana zvekuputira. Nheyo ye ion plating yakatanga kukurudzirwa naDM Mattox. Kune mhando dzakawanda dze ion plating. Rudzi rwakajairika ndeye evaporation heating, kusanganisira resistance heating, electron beam heating, plasma electron beam heating, high-frequency induction heating nedzimwe nzira dzekupisa.
Nguva yekutumira: Kukadzi-14-2023