Ion kupfekamuchina yakabva padzidziso yakataurwa naDM Mattox muma1960, uye miedzo inowirirana yakatanga panguva iyoyo;Kusvika 1971, Chambers nevamwe vakaburitsa tekinoroji yeelectron beam ion plating;Iyo reactive evaporation plating (ARE) tekinoroji yakataurwa mushumo yeBunshah muna 1972, apo mhando dzemafirimu dzakaoma-zvakaoma seTiC neTiN dzakagadzirwa;Zvakare muna 1972, Smith naMolley vakatora tekinoroji yegorodhi cathode mukugadzirisa.Pakazosvika ma1980s, iyo ion plating muChina yakanga yasvika padanho rekushandiswa kwemaindasitiri, uye maitiro ekunamira akadai sevacuum multi-arc ion plating uye arc-discharge ion plating akange aoneka zvakatevedzana.
Iyo yese yekushanda maitiro evacuum ion plating ndeaya anotevera: kutanga,pombivacuum chamber, uyezvewaitiyo vacuum pressure kusvika 4X10 ⁻ ³ Pakana nani, zvinodikanwa kubatanidza iyo yakakwira voltage magetsi uye kuvaka yakaderera tembiricha plasma nzvimbo yakaderera voltage discharge gasi pakati pe substrate uye evaporator.Batanidza iyo substrate electrode ne5000V DC yakaipa yakakwira voltage kuti uite kupenya kwekubuda kwecathode.Inert gasi maion anogadzirwa pedyo nenzvimbo isina kunaka inopenya.Vanopinda munzvimbo ine rima yecathode uye vanokwidziridzwa nemunda wemagetsi uye bhomba pamusoro pe substrate.Iyi inzira yekuchenesa, uye wobva wapinda maitiro ekuputira.Kuburikidza nemhedzisiro yekudziya kwebhomba, zvimwe zvinhu zveplating zvinonyungudika.Nzvimbo yeplasma inopinda mumapurotoni, inodhumhana nema electrons uye inert gas ions, uye chikamu chiduku chazvo chinoiswa ionized, Aya maioni ionized ane simba guru achabhomba pamusoro pefirimu uye anovandudza kunaka kwefirimu kune imwe nzvimbo.
Nheyo yevacuum ion plating ndeiyi: mukamuri yevacuum, uchishandisa gasi rinoburitsa chiitiko kana iyo ionized chikamu cheiyo vaporized zvinhu, pasi pekubhomba kweiyo vaporized zvinhu ion kana gasi ion, panguva imwe chete isa izvi zvinhu zvakasvibiswa kana zvinobatika pa substrate. kuwana firimu rakaonda.Iyo ion coatingmuchinainosanganisa vacuum evaporation, tekinoroji yeplasma uye kubuda kwegesi kupenya, izvo zvisingangogadziri mhando yefirimu, asiwo inowedzera huwandu hwemashandisirwo emufirimu.Mabhenefiti eiyi maitiro akasimba diffraction, yakanaka firimu adhesion, uye akasiyana ekupfekedza zvinhu.Nheyo yeion plating yakatanga kukurudzirwa naDM Mattox.Kune akawanda marudzi eion plating.Rudzi runonyanya kuzivikanwa ndeye evaporation kupisa, kusanganisira kuramba kupisa, electron beam heat, plasma electron beam heat, high-frequency induction heat uye dzimwe nzira dzekudziya.
Nguva yekutumira: Feb-14-2023