Kedu ihe bụ ụkpụrụ ọrụ nke igwe Ion Plating

mkpuchi ionigwe sitere na ozizi nke DM Mattox tụrụ aro na 1960s, nnwale ndị kwekọrọ na ya malitere n'oge ahụ; Ruo 1971, Chambers na ndị ọzọ bipụtara teknụzụ nke mkpuchi ion electron beam; A kọwara teknụzụ evaporation plating (ARE) na akụkọ Bunshah na 1972, mgbe e mepụtara ụdị ihe nkiri siri ike dị ka TiC na TiN; Ọzọkwa na 1972, Smith na Molley nakweere teknụzụ kathode hollow na usoro mkpuchi. Ka ọ na-erule afọ 1980s, mkpuchi ion na China erutela ọkwa nke ngwa ụlọ ọrụ mmepụta ihe, usoro mkpuchi dị ka mkpuchi ion multi-arc vacuum na mkpuchi ion arc-discharge apụtawokwa n'usoro.

Usoro ọrụ dum nke mkpuchi ion vacuum bụ dị ka ndị a: nke mbụ,mgbapụtaụlọ a na-ekpo ọkụ, weecherenrụgide vacuum ruo 4X10 ⁻ ³ Pama ọ bụ ka mma, ọ dị mkpa ijikọ ike voltaji dị elu ma wuo mpaghara plasma dị ala nke gas mwepụta voltaji dị ala n'etiti substrate na evaporator. Jikọọ electrode substrate na voltaji dị elu 5000V DC iji mepụta mwepụta ọkụ nke cathode. A na-emepụta ion gas inert nso mpaghara ọkụ na-adịghị mma. Ha na-abanye na mpaghara gbara ọchịchịrị nke cathode ma na-eme ngwa ngwa site na ubi eletrik ma na-agbagharị elu nke substrate ahụ. Nke a bụ usoro nhicha, wee banye na usoro mkpuchi. Site na mmetụta nke ikpo ọkụ bọmbụ, a na-eme ka ụfọdụ ihe mkpuchi dị na uzuoku. Mpaghara plasma na-abanye na protons, na-adakọ na electrons na ion gas inert, obere akụkụ ha na-aghọkwa ionized. ion ndị a nwere ike dị elu ga-etisa elu ihe nkiri ahụ ma melite mma ihe nkiri ahụ ruo n'ókè ụfọdụ.

Ụkpụrụ nke mkpuchi ion vacuum bụ: n'ime ụlọ vacuum, site na iji ihe na-apụta n'ime gas ma ọ bụ akụkụ ion nke ihe ahụ e ji vaporized mee, n'okpuru bọmbụ nke ion ma ọ bụ ion gas, na-etinye ihe ndị a e ji vaporized mee ma ọ bụ ihe ndị na-eme ka ha na-emegharị ahụ n'elu ihe ahụ iji nweta ihe mkpuchi dị gịrịgịrị.igwena-ejikọta ikuku ikuku, teknụzụ plasma na mwepụ gas glow, nke na-eme ka mma ihe nkiri ahụ ka mma, kamakwa ọ na-eme ka usoro ojiji nke ihe nkiri ahụ gbasaa. Uru nke usoro a bụ diffraction siri ike, ezigbo njikọta ihe nkiri, na ihe mkpuchi dị iche iche. DM Mattox bu ụzọ tụọ aro ụkpụrụ nke mkpuchi ion. E nwere ọtụtụ ụdị mkpuchi ion. Ụdị kachasị bụ ikpo ọkụ evaporation, gụnyere ikpo ọkụ iguzogide, ikpo ọkụ electron, ikpo ọkụ electron plasma, ikpo ọkụ induction ugboro ugboro na ụzọ ikpo ọkụ ndị ọzọ.