Menene Ka'idar Aiki ta na'urar Ion Plating

Rufin ioninjin Ya samo asali ne daga ka'idar da DM Mattox ya gabatar a shekarun 1960, kuma gwaje-gwajen da suka yi daidai sun fara a wancan lokacin; Har zuwa 1971, Chambers da wasu sun buga fasahar plating na ion na electron beam; An nuna fasahar reactive evaporation plating (ARE) a cikin rahoton Bunshah a 1972, lokacin da aka samar da nau'ikan fina-finai masu ƙarfi kamar TiC da TiN; Haka kuma a 1972, Smith da Molley sun rungumi fasahar cathode mai zurfi a cikin tsarin rufewa. Zuwa shekarun 1980, plating na ion a China ya kai matakin aikace-aikacen masana'antu, kuma hanyoyin rufewa kamar plating na ion mai yawa da kuma plating na arc-discharge ion sun bayyana a jere.

Tsarin aikin plating na injin ion kamar haka: na farko,famfoɗakin wanke-wanke, sannanjiramatsin lamba na injin tsotsa zuwa 4X10⁻ ³ ​​Pako mafi kyau, ya zama dole a haɗa wutar lantarki mai ƙarfi da kuma gina yankin plasma mai ƙarancin zafin jiki na iskar gas mai ƙarancin wutar lantarki tsakanin substrate da evaporator. Haɗa electrode ɗin substrate da ƙarfin lantarki mai ƙarfi na 5000V DC don samar da fitowar haske na cathode. Ana samar da ions na iskar gas mara aiki kusa da yankin haske mara kyau. Suna shiga yankin duhu na cathode kuma filin lantarki yana hanzarta su kuma suna jefa bam a saman substrate. Wannan tsari ne na tsaftacewa, sannan kuma suna shiga tsarin rufewa. Ta hanyar tasirin dumama bam, wasu kayan rufi suna tururi. Yankin plasma yana shiga cikin protons, yana karo da electrons da ions na iskar gas mara aiki, kuma ƙaramin ɓangare na su yana da ions. Waɗannan ions masu ions masu ƙarfi da ƙarfi za su yi ruwan sama a saman fim ɗin kuma su inganta ingancin fim ɗin zuwa wani mataki.

Ka'idar plating na ion na vacuum shine: a cikin ɗakin injin, ta amfani da yanayin fitar da iskar gas ko ɓangaren ion na kayan da aka tururi, a ƙarƙashin bam ɗin ions ko ions na kayan da aka tururi, a lokaci guda suna sanya waɗannan abubuwan da aka tururi ko abubuwan da ke haifar da su a kan substrate don samun siririn fim. Rufin ioninjinya haɗa fitar da iskar gas, fasahar plasma da fitar da iskar gas, wanda ba wai kawai yana inganta ingancin fim ɗin ba, har ma yana faɗaɗa kewayon aikace-aikacen fim ɗin. Fa'idodin wannan tsari sune ƙarfin diffraction, kyakkyawan mannewa na fim, da kayan shafa daban-daban. DM Mattox ne ya fara gabatar da ƙa'idar plating na ion. Akwai nau'ikan plating na ion da yawa. Nau'in da aka fi sani shine dumama evaporation, gami da dumama juriya, dumama wutar lantarki, dumama wutar lantarki ta plasma, dumama wutar lantarki mai yawan mita da sauran hanyoyin dumama.