I-ion enamathelaumshini yavela embonweni eyahlongozwa ngu-DM Mattox ngeminyaka yawo-1960, futhi ukuhlola okuhambisanayo kwaqala ngaleso sikhathi; Kuze kube ngu-1971, uChambers nabanye bashicilela ubuchwepheshe be-electron beam ion plating; Ubuchwepheshe be-reactive evaporation plating (ARE) bavezwa embikweni we-Bunshah ngo-1972, lapho kukhiqizwa izinhlobo zamafilimu aqine kakhulu njenge-TiC ne-TiN; Futhi ngo-1972, uSmith noMolley bamukela ubuchwepheshe be-cathode obungenalutho enqubweni yokumboza. Ngawo-1980, i-ion plating e-China yagcina ifinyelele ezingeni lokusetshenziswa kwezimboni, futhi izinqubo zokumboza ezifana ne-vacuum multi-arc ion plating kanye ne-arc-discharge ion plating zase zivele zilandelana.
Yonke inqubo yokusebenza ye-vacuum ion plating imi kanje: okokuqala,futhaigumbi levacuum, bese-kelindaukucindezela kwe-vacuum ku-4X10 ⁻ ³ Panoma okungcono, kuyadingeka ukuxhuma amandla kagesi aphezulu futhi kwakhiwe indawo ye-plasma yokushisa ephansi yegesi yokukhishwa kwe-voltage ephansi phakathi kwe-substrate ne-evaporator. Xhuma i-electrode engaphansi ne-5000V DC negative high voltage ukuze wenze ukuphuma okukhanyayo kwe-cathode. Ama-ion egesi angenayo akhiqizwa eduze kwendawo yokukhanya okunegethivu. Bangena endaweni emnyama ye-cathode futhi basheshiswa yinkundla kagesi futhi baqhume ibhomu ebusweni be-substrate. Lena inqubo yokuhlanza, bese ufaka inqubo yokugqoka. Ngomphumela wokushisisa ngebhomu, ezinye izinto zokucwenga ziyahwamuka. Indawo ye-plasma ingena kuma-proton, ingqubuzana nama-electron kanye nama-ion egesi angenayo, futhi ingxenye encane yawo i-ionized, Lawa ma-ion ionized anamandla aphezulu azoqhuma ifilimu ebusweni futhi athuthukise ikhwalithi yefilimu ngezinga elithile.
Umgomo we-vacuum ion plating uthi: egumbini le-vacuum, kusetshenziswa into ekhishwa igesi noma ingxenye ye-ionized yento ehwamukayo, ngaphansi kokuqhuma kwama-ion amnyama noma ama-ion egesi, kanyekanye faka lezi zinto ezihwamukile noma ama-reactants azo ku-substrate ukuze uthole ifilimu elincanyana. I-ion enamathelaumshiniihlanganisa ukuhwamuka kwe-vacuum, ubuchwepheshe be-plasma kanye nokukhishwa kokukhanya kwegesi, okungathuthukisi nje kuphela ikhwalithi yefilimu, kodwa futhi kwandise ububanzi bokusetshenziswa kwefilimu. Izinzuzo zale nqubo yi-diffraction eqinile, ukunamathela okuhle kwefilimu, nezinto ezihlukahlukene zokugqoka. Umgomo wokufakwa kwe-ion wahlongozwa okokuqala ngu-DM Mattox. Kunezinhlobo eziningi ze-ion plating. Uhlobo oluvame kakhulu ukushisa okuhwamukayo, okuhlanganisa ukushisisa ukumelana, ukufudumeza kwe-electron beam, i-plasma electron beam heat, high-frequency induction heat kanye nezinye izindlela zokufudumeza.
Isikhathi sokuthumela: Feb-14-2023