Inqubo yokugqoka i-ion ye-cathode engenalutho imi kanje:
1. Faka izingcezu zesilevu ekugoqeni.
2, Ukufaka i-workpiece.
3. Ngemva kokuphuma uye ku-5×10-3Pa, igesi ye-argon ifakwa ekamelweni lokumboza lisuka epayipini lesiliva, futhi izinga le-vacuum licishe libe yi-100Pa.
4. Vula amandla okukhetha.
5. Ngemva kokuvula amandla e-arc ukuze kuvuthe ukukhishwa kwe-cathode engenalutho. Ukukhishwa kokukhanya kukhiqizwa epayipini lenkinobho, i-Discharge voltage ingu-800~1000V, i-arc-raising current ingu-30~50A. Ngenxa yomphumela we-cathode engenalutho wokukhishwa kokukhanya, i-high glow discharge current density, i-high density yama-rat ion epayipini lesiliva ihlasela udonga lwepayipi elibonakalayo, Yenza udonga lwepayipi lufudumale ngokushesha kuze kufike ekuphumeni kwe-electron, imodi yokukhipha kusukela ekukhishweni kokukhanya ishintshe ngokuzumayo ibe yi-arc discharge, i-Voltage ingu-40~70V, i-Current ingu-80~300A. Izinga lokushisa lepayipi lesiliva lifinyelela ngaphezu kuka-2300K, i-Incandescent, Ikhipha umfudlana we-arc electron ogcwele kakhulu ovela epayipini, bese idubula iye ku-anode.
6, Ukulungiswa kwezinga le-vacuum. Izinga le-vacuum lokukhipha ukukhanya okuvela kusibhamu se-cathode esingenalutho licishe libe yi-100 Pa, kanti izinga le-vacuum lokufaka lingu-8 × 10-1 ~ 2 Pa. Ngakho-ke, Ngemva kokushisa kokukhipha i-arc, Nciphisa igesi ye-argon engenayo ngokushesha okukhulu, Lungisa izinga le-vacuum libe ububanzi obufanele ukumbozwa.
7. Isendlalelo sesisekelo esimbozwe nge-titanium. Ukugeleza kwe-electron ku-ingot yensimbi ye-Chin ewile ngokungahleliwe, Ukuguqulwa kwamandla e-kinetic abe amandla okushisa, Ukuhwamuka kwensimbi ye-Chin ngokushisa, Ama-athomu omhwamuko afinyelela endaweni yokusebenza ukuze akhe ifilimu ye-titanium.
8、Ukufakwa kwe-TiN. Igesi ye-nitrogen inikezwa ekamelweni lokumboza, igesi ye-nitrogen kanye nama-athomu ahwamukile afakwa ku-ion abe yi-nitrogen kanye nama-titanium ions. Ngaphezu kwe-crucible, amathuba aphezulu okushayisana kwe-inelastic kwama-athomu e-titanium vapor anemifudlana emide yama-electron anamandla aphansi, Izinga lokuhlukana kwensimbi liphezulu njengo-20% ~ 40%., Ama-ion e-titanium angase asabele ngamakhemikhali nge-reaction gas nitrogen, Ukufakwa ukuze kutholakale ungqimba lwefilimu ye-nitride mantle. Isibhamu se-cathode esingenalutho siwumthombo wokuhwamuka, Omunye umthombo we-ionization. Ngesikhathi sokumboza, ugesi we-electromagnetic coil ozungeze i-crucible nawo kufanele ulungiswe, Gxila umsebe we-electron enkabeni yokuwa, Ngakho-ke, amandla okugeleza kwe-electron ayanda.
9, Cima. Ngemva kokuba ukujiya kwefilimu sekufinyelele ukujiya kwefilimu okunqunyiwe, Cima ugesi we-arc, ugesi we-Bias kanye nokunikezwa komoya.
Isikhathi sokuthunyelwe: Julayi-08-2023