Inkqubo yokugquma i-ion ye-cathode engenanto imi ngolu hlobo lulandelayo:
1. Beka ii-ingots ze-Chin kwindawo yokuwa.
2, Ukufaka i-workpiece.
3. Emva kokuphuma ukuya kwi-5 × 10-3Pa, igesi ye-argon ifakwa kwigumbi lokugquma ukusuka kwityhubhu yesilivere, kwaye inqanaba le-vacuum limalunga ne-100Pa.
4. Vula amandla okukhetha icala.
5. Emva kokuvula amandla e-arc ukuze kuvuthelwe ukukhutshwa kwe-cathode engenanto. Ukukhutshwa kokukhanya kwenziwa kwityhubhu yeqhosha, i-Discharge voltage yi-800 ~ 1000V, i-arc-raising current yi-30 ~ 50A. Ngenxa yesiphumo se-cathode engenanto yokukhutshwa kokukhanya, i-glow discharge current density ephezulu, i-rat ions kwityhubhu yesilivere ihlasela udonga lwetyhubhu ye-vantage, Yenza udonga lwetyhubhu lufudumale ngokukhawuleza ukuya ekuphumeni kokuphuma kwe-electron, imo yokukhupha ukusuka ekukhutshweni kokukhanya itshintshe ngequbuliso ukuya ekukhutshweni kwe-arc, iVoltage yi-40 ~ 70V, i-Current yi-80 ~ 300A. Ubushushu betyhubhu yesilivere bufikelela ngaphezulu kwe-2300K, i-Incandescent, ikhupha umsinga ophezulu we-arc electrons kwityhubhu, ize idubule iye kwi-anode.
6, Ukulungiswa kwenqanaba le-vacuum. Inqanaba le-vacuum lokukhupha ukukhanya kwi-cathode gun engenanto limalunga ne-100 Pa, kwaye inqanaba le-vacuum lokufaka i-vacuum yi-8 × 10-1 ~ 2 Pa. Ke ngoko, emva kokutsha kokukhupha i-arc, Nciphisa igesi ye-argon engenayo ngokukhawuleza, Lungisa inqanaba le-vacuum libe luluhlu olufanelekileyo lokufaka i-vacuum.
7. Umaleko wesiseko ogqunywe ngeTitanium. I-electron ingena kwi-ingot yesinyithi yeChin ewileyo ngokungenawo umoya, Ukuguqulwa kwamandla e-kinetic abe ngamandla obushushu, Ukufuma kwesinyithi seChin ngokufudumeza, Iiathom zomphunga zifikelela kwindawo yokusebenza ukuze zenze ifilimu yetitanium.
8、Ukufakwa kweTiN. Igesi yeNitrogen inikezelwa kwigumbi lokugquma, igesi yeNitrogen kunye neeathom ezikhutshiweyo zifakwa kwi-ion zibe yi-nitrogen kunye nee-ion ze-titanium. Ngaphezulu kwe-crucible, Amathuba aphezulu okungqubana kwe-inelastic kweeathom zomphunga we-titanium kunye nemijelo exineneyo yee-electron ezinamandla aphantsi, Izinga lokuqhekeka kwesinyithi liphezulu ukuya kwi-20% ~ 40%., Ii-ion zeTitanium zinokwenzeka ukuba ziphendule ngokwekhemikhali nge-nitrogen yegesi yokusabela, Ukufakwa ukuze kufunyanwe umaleko wefilimu ye-nitride mantle. Isibhamu se-cathode esingenanto singumthombo wokuphefumla, Omnye umthombo we-ionization. Ngexesha lokugquma, umbane we-coil ye-electromagnetic ejikeleze i-crucible nawo kufuneka ulungiswe, Gxila umqadi we-electron embindini wokuwa, Ke ngoko, uxinano lwamandla okuhamba kwe-electron luyanda.
9, Cima umbane. Emva kokuba ubukhulu befilimu bufikelele kubukhulu befilimu obumiselweyo, Cima umbane we-arc, umbane we-Bias kunye nombane womoya.
Ixesha lokuthumela: Julayi-08-2023