Inkqubo yokugquma i-ion cathode ihambe ngolu hlobo lulandelayo:
1, Beka i-Chin ingots ekuweni.
2. Ukunyuswa kwesixhobo sokusebenza.
3 、 Emva kokufuduka ukuya kwi-5 × 10-3Pa, igesi ye-argon yaziswa kwigumbi lokugquma ukusuka kwityhubhu yesilivere, kwaye inqanaba lokufunxa lijikeleze i-100Pa.
4. Vula amandla okukhetha.
5, Emva kokukhanyisa amandla e-arc ukutshisa i-cathode evulekileyo. Ukukhutshwa okukhanyayo kuveliswa kwityhubhu yeqhosha, i-voltage yokukhupha yi-800 ~ 1000V, i-arc-uping current yi-30 ~ 50A. ukukhutshwa, ukukhutshwa okukhanyayo okuphakamileyo koxinzelelo lwangoku, Uxinaniso oluphezulu lwee-ion zerati kwityhubhu yesilivere ibhobhoza udonga lwetyhubhu yevantage, Yenza udonga lwetyhubhu lufudumale lufudumale ukuya ekuphumeni kokuhamba kwe-electron, imowudi yokukhupha ukusuka ekuphumeni okukhanyayo itshintshe ngequbuliso ukuya. ukukhutshwa kwe-arc,I-Voltage yi-40 ~ 70V, yangoku yi-80 ~ 300A. Ubushushu betyhubhu yesilivere bufikelela ngaphezu kwe-2300K, i-Incandescent, ikhupha umlambo ophezulu wee-electron ze-arc ukusuka kwityhubhu, kwaye idutyulwe kwi-anode.
6, Ukulungelelaniswa kwenqanaba le-vacuum.Inqanaba lokucoca lokukhutshwa okukhanyayo kwi-cathode gun imalunga ne-100 Pa,Kwaye iqondo le-vacuum yokugquma yi-8×10-1 ~ 2Pa.Ngoko ke,Emva kokutshiswa kwe-arc yokukhupha,Nciphisa i-argon engenayo. igesi ngokukhawuleza, Lungisa inqanaba levacuum kuluhlu olulungele ukugquma.
I-7, i-Titanium plated base layer.I-Electron igeleza kwi-ingot yentsimbi ye-Chin edilikileyo, Ukuguqulwa kwamandla e-kinetic ukuya kumandla obushushu, ukuPhuphuma kwentsimbi ye-Chin ngokufudumeza, iiathom zomphunga zifikelela kwindawo yokwenza ifilimu ye-titanium.
8, Ukubekwa kwe-TiN. Irhasi yeNitrojeni inikezelwa kwigumbi lokugquma, igesi yeNitrogen kunye neeathom ezimphunga zifakwa i-ionized nitrogen kunye ne-titanium ion. Ngaphezulu kwe-crucible, amathuba aphezulu okungqubana kwe-inelastic ye-athom yomphunga we-titanium enemisinga eshinyeneyo yee-electron zamandla aphantsi, Izinga lokuqhawulwa kwesinyithi liphezulu ukuya kuma-20% ~ 40%.,I-ion ze-Titanium kunokwenzeka ukuba ziphendule imichiza kunye ne-nitrogen yegesi ye-reaction,I-Deposition yokufumana umaleko wefilimu ye-nitride mantle.Umpu we-cathode ovulekileyo zombini ngumthombo wokuphunga,Omnye umthombo ye-ionization.Ngexesha lokugquma,Umjelo wekhoyili ye-electromagnetic ejikeleze i-crucible kufuneka ilungelelaniswe,Gxininisa umqa we-electron kumbindi wokuwa,Ngoko ke, ukuxinana kwamandla okuhamba kwe-electron kuye kwanda.
9, Power Off.Emva kokuba ubukhulu befilimu bufikelele kubukhulu befilimu obumiselwe kwangaphambili, Cima unikezelo lwamandla e-arc, unikezelo lwamandla lweBias kunye nonikezelo lomoya.
Ixesha lokuposa: Jul-08-2023