Kaʻina hana o ka hollow cathode ion coating

ʻO ke kaʻina hana o ka hollow cathode ion coating penei:

1、E hoʻokomo i nā ingots Chin i ka hāʻule.

2. Ke kau nei i ka mea hana.

3、Ma hope o ka haʻalele ʻana i 5 × 10-3Pa, ua hoʻokomo ʻia ke kinoea argon i loko o ke keʻena uhi mai ka paipu kālā, a ʻo ka pae haʻahaʻa ma kahi o 100Pa.

4、E hoʻā i ka mana bias.

5、Ma hope o ka hoʻohuli ʻana i ka mana arc e hoʻā i ka hollow cathode discharge.The glow discharge i hana ʻia i loko o ka pahu pihi, Discharge voltage ʻo 800 ~ 1000V, ʻO ke arc-raising current is 30 ~ 50A.Due to the hollow cathode effect of glow ka hoʻokuʻu ʻana, ʻO ka haʻahaʻa kiʻekiʻe o nā ʻiole i loko o ka pahu kālā e hoʻopololei i ka paia o ka paipu hiʻona, E hoʻomaʻamaʻa koke i ka paia o ka paipu a hiki i ka hoʻokuʻu ʻana o ke kahe electron, ke ʻano hoʻokuʻu ʻana mai ka hoʻokuʻu ʻana i ka uila. arc hoʻokuʻu, Voltage mea 40 ~ 70V, ʻO kēia manawa ka 80 ~ 300A.Silver paipu wela hiki ma luna o 2300K, Incandescent, Emits he kiʻekiʻe density kahawai o arc electrons mai ka paipu, a pana i ka anode.

6、Ka hoʻololi ʻana i ka pae ʻāwīwī. ʻO ke kiʻekiʻe o ka ʻūhā no ka hoʻokuʻu ʻana mai ka pu cathode puʻe ma kahi o 100 Pa, A ʻo ke degere o ka uhi ʻana he 8 × 10-1 ~ 2Pa. kinoea i ka hikiwawe loa, E hoʻololi i ke kiʻekiʻe o ka vacuum i kahi ākea kūpono no ka uhi ʻana.

7、Titanium plated base layer.Electron flow on the anodically collapsed Chin metal ingot,Conversion of kinetic energy to thermal energy,Evaporation of Chin metala ma ka wela,Vapor atoms hiki i ka workpiece e hana i ka titanium film.

8、Deposition o TiN.Nitrogen kinoea ua hoʻolako 'ia i ka uhi keʻena, Nitrogen kinoea a me evaporated nā mana i ionized i ka nitrogen a me ka titanium ions.Above ka crucible, Higher probability o inelastic collisions o titanium mahu nā mana me nā kahawai o haʻahaʻa-ikena electrons, ʻO ke kiʻekiʻe o ka dissociation metala e like me 20% ~ 40%., ʻoi aku ka maikaʻi o nā ion Titanium e hana kemika me ke kinoea kinoea hopena, Deposition e kiʻi i kahi papa kiʻi ʻoniʻoni nitride mantle. o ka ionization. I ka wā o ka uhi ʻana, Pono e hoʻoponopono ʻia ke ʻano o ka coil electromagnetic a puni ka crucible.

9、Power Off.After ke kiʻi mānoanoa a hiki i ka predetermined film mānoanoa, hoohuli arc mana lako、Bias mana lako a me ka ea lako.