Cov txheej txheem ntawm cov txheej txheem cathode ion hollow

Cov txheej txheem ntawm hollow cathode ion txheej yog raws li nram no:

1. Muab cov pob zeb Chin tso rau hauv qhov chaw puas tsuaj.

2. Mounting lub workpiece.

3、Tom qab tshem tawm mus rau 5 × 10-3Pa, cov roj argon raug coj mus rau hauv chav txheej los ntawm lub raj nyiaj, thiab qib nqus tsev yog nyob ib puag ncig 100Pa.

4, Tig rau lub hwj chim tsis ncaj ncees.

5, Tom qab tig lub zog arc los hlawv cov cathode hollow. Lub teeb ci ntsa iab tsim nyob rau hauv lub raj khawm, Lub zog tawm hluav taws xob yog 800 ~ 1000V, Lub zog arc-raising yog 30 ~ 50A. Vim yog lub cathode hollow ntawm lub teeb ci ntsa iab, Lub zog ci ntsa iab siab, Lub zog siab ntawm cov ions rat hauv lub raj nyiaj bombards phab ntsa ntawm lub raj vantage, Ua rau lub raj phab ntsa sov sai sai rau qhov tso tawm ntawm electron ntws, hom tso tawm los ntawm lub teeb ci ntsa iab hloov pauv mus rau arc tso tawm, Lub zog yog 40 ~ 70V, Tam sim no yog 80 ~ 300A. Lub raj nyiaj kub txog saum 2300K, Incandescent, Tso tawm cov kwj deg siab ntawm arc electrons los ntawm lub raj, thiab tua mus rau anode.

6, Kev kho qhov theem nqus tsev. Qhov theem nqus tsev rau kev tso tawm ntawm lub teeb ci ntsa iab los ntawm rab phom cathode hollow yog li 100 Pa, Thiab qhov degree nqus tsev ntawm txheej yog 8 × 10-1 ~ 2Pa. Yog li ntawd, Tom qab hluav taws xob ntawm qhov tso tawm arc, Txo cov roj argon nkag sai li sai tau, Kho qhov theem nqus tsev rau qhov ntau uas haum rau txheej.

7, Titanium plated puag txheej. Electron ntws mus rau ntawm lub anodically collapsed Chin hlau ingot, Hloov pauv ntawm lub zog kinetic mus rau lub zog thermal, Evaporation ntawm Chin hlau los ntawm cua sov, Vapor atoms ncav cuag lub workpiece los tsim ib zaj duab xis titanium.

8, Kev Tso TiN. Cov pa roj nitrogen raug muab rau hauv lub chamber txheej, Cov pa roj nitrogen thiab cov atoms evaporated raug ionized rau hauv nitrogen thiab titanium ions. Saum lub crucible, Muaj feem ntau dua ntawm kev sib tsoo inelastic ntawm cov titanium vapor atoms nrog cov kwj deg ntawm cov electrons qis zog, Tus nqi dissociation hlau yog siab li 20% ~ 40%., Titanium ions yuav muaj feem cuam tshuam nrog cov pa nitrogen, Kev Tso kom tau txais ib txheej nitride mantle zaj duab xis. Lub phom cathode hollow yog ob qho tib si qhov chaw vaporization, Lwm qhov chaw ntawm ionization. Thaum lub sijhawm txheej, Lub zog ntawm electromagnetic coil nyob ib puag ncig lub crucible kuj yuav tsum tau kho, Tsom lub electron beam rau hauv nruab nrab ntawm qhov tawg, Yog li, lub zog ceev ntawm electron ntws nce.

9, Fais fab tua. Tom qab lub zaj duab xis tuab mus txog qhov tuab zaj duab xis uas tau teev tseg, tua lub hwj chim arc, lub hwj chim Bias thiab cua.