Ts'ebetso ea ho koahela ion ea cathode e se nang letho

Ts'ebetso ea ho koahela ion ea cathode e se nang letho e tjena:

1、Kenya li-ingot tsa seledu ka har'a ho putlama.

2, Ho kenya workpiece.

3. Kamora ho tloha ho 5×10-3Pa, khase ea argon e kenngoa ka phapusing ea ho roala ho tsoa tube ea silevera, 'me boemo ba vacuum bo ka ba 100Pa.

4. Bulela matla a leeme.

5. Kamora ho bulela matla a arc ho hotetsa phallo e se nang letho ya cathode. Phallo e kganyang e hlahiswa ka hara tube ya konopo, Motlakase wa ho ntsha motlakase ke 800~1000V, Motlakase o phahamisang motlakase ke 30~50A. Ka lebaka la phello e se nang letho ya cathode ya phallo e kganyang, Bongata bo phahameng ba kganya ya motlakase, Bongata bo phahameng ba di-ion tsa rat ka hara tube ya silevera bo hlasela lebota la tube ya vantage, E etsa hore lebota la tube le futhumale ka potlako ho fihlela phallo ya dielektrone e ntshwa, mokgwa wa phallo ho tloha phallong e kganyang e fetoha ka tshohanyetso ho ya phallong ya motlakase ya arc, Voltage ke 40~70V, Motlakase ke 80~300A. Mocheso wa tube ya silevera o fihla ka hodimo ho 2300K, Incandescent, E ntsha phallo e phahameng ya dielektrone tsa arc ho tloha tubeng, mme e thunye ho anode.

6, Ho lokisa boemo ba vacuum. Boemo ba vacuum bakeng sa ho ntsha kganya ho tswa sethunyeng sa cathode se nang le sekoti ke hoo e ka bang 100 Pa, mme tekanyo ya vacuum ya ho roala ke 8 × 10-1 ~ 2Pa. Ka hona, Kamora ho hotetsa ho ntsha arc, Fokotsa khase e kenang ya argon kapele kamoo ho ka kgonehang, Fetola boemo ba vacuum ho ya sebakeng se loketseng ho roala.

7, lera la motheo le phuthetsweng ka titanium. Elektrone e phalla ho ingot ya tshepe ya Chin e weleng ka mokhoa o sa laoleheng, Phetoho ya matla a kinetic ho ba matla a mocheso, Mouoane wa tshepe ya Chin ka ho futhumatsa, diathomo tsa mouoane di fihla mosebetsing ho etsa filimi ya titanium.

8、Ho ntshwa ha TiN. Khase ya naetrojene e fanwa ka phaposing ya ho kwahela, Khase ya naetrojene mme diathomo tse mouoane di ntshwa di ionized ho ba di-ion tsa naetrojene le titanium. Ka hodima sebopi, Monyetla o moholo wa ho thulana ha diathomo tsa mouoane wa titanium ka melapo e teteaneng ya dielektrone tse nang le matla a tlase, Sekgahla sa ho arohana ha tshepe se hodimo ho fihla ho 20% ~ 40%., Di-ion tsa titanium di na le monyetla o moholo wa ho arabela ka dikhemikhale le naetrojene ya kgase ya karabelo, Ho ntshwa ho fumana lera la filimi ya nitride mantle. Sethunya sa cathode se se nang letho ke mohlodi wa mouoane, Mohlodi o mong wa ionization. Nakong ya sebopi, hona jwale ya khoele ya electromagnetic e potileng sebopi le yona e lokela ho lokiswa, Tsepamisa mahlasedi a dielektrone bohareng ba ho putlama, Kahoo, matla a phallo ya dielektrone a a eketseha.

9, Tima motlakase. Kamora hore botenya ba filimi bo fihle botenya ba filimi bo reriloeng esale pele, tima phepelo ea motlakase ea arc, phepelo ea motlakase ea Leeme le phepelo ea moea.