Usoro nke mkpuchi ion kathode oghere

Usoro nke mkpuchi ion cathode oghere bụ dị ka ndị a:

1. Tinye mkpụrụ osisi Chin n'ime mkpọda ahụ.

2, Ịwụnye ihe eji arụ ọrụ ahụ.

3, Mgbe ọ gbapụrụ gaa na 5 × 10-3Pa, a na-etinye gas argon n'ime ụlọ mkpuchi site na ọkpọkọ ọlaọcha, ọkwa ikuku ahụ dịkwa ihe dịka 100Pa.

4. Gbanye ike nke na-emegide echiche.

5, Mgbe agbanyere ike arc iji gbanye mgbapụta cathode oghere. A na-emepụta mgbapụta na-egbukepụ egbukepụ n'ime ọkpọkọ bọtịnụ, voltaji mwepụta bụ 800 ~ 1000V, ọkụ na-ebuli arc bụ 30 ~ 50A. N'ihi mmetụta cathode oghere nke mgbapụta na-egbukepụ egbukepụ, Njupụta ọkụ na-egbukepụ egbukepụ dị elu, Njupụta oke nke ion oke na ọkpọkọ ọlaọcha na-adakwasị mgbidi nke ọkpọkọ vantage, Mee ka mgbidi ọkpọkọ ahụ kpoo ọkụ ngwa ngwa ruo na mwepụ nke mmiri elektrọn, ọnọdụ mwepụta site na mgbapụta na-egbukepụ egbukepụ gbanwere na mwepụ arc, Voltaji bụ 40 ~ 70V, Ọsọ bụ 80 ~ 300A. Okpomọkụ tube ọlaọcha ruru karịa 2300K, Na-enwu enwu, Na-ewepụta nnukwu njupụta nke elektrọn arc site na ọkpọkọ ahụ, wee gbaa ya na anode.

6, Nhazi ọkwa oghere ikuku. Ọkwa oghere ikuku ikuku maka mwepụta ọkụ site na egbe katode oghere dị ihe dị ka 100 Pa, Ọkwa oghere ikuku mkpuchi ahụ bụkwa 8 × 10-1 ~ 2 Pa. Ya mere, Mgbe agbanyụrụ mgbapụta arc, Belata gas argon na-abata ozugbo enwere ike, Gbanwee ọkwa oghere ikuku ahụ ka ọ bụrụ nke dabara adaba maka mkpuchi.

7, Titanium kpuchiri ala oyi akwa. Electron na-asọba n'ime ingot ígwè Chin nke dara ada, Mgbanwe nke ike kinetic ka ọ bụrụ ike okpomọkụ, Mmiri nke ígwè Chin site na ikpo ọkụ, Atọm vapor na-erute ọrụ ahụ iji mepụta ihe nkiri titanium.

8, Ntinye TiN. A na-enye gas nitrogen na ụlọ mkpuchi, a na-agbanwe gas nitrogen na atọm ndị a gbapụrụ agbapụ ka ha bụrụ ion nitrogen na ion titanium. N'elu crucible, Ohere dị elu nke nkpọkọ inelastic nke atọm vapor titanium nwere iyi dị oke nke elektrọn dị ala, ọnụego nkewa ígwè dị elu dị ka 20% ~ 40%., ion titanium nwere ike imeghachi omume na kemịkalụ na nitrogen gas mmeghachi omume, Ntinye iji nweta oyi akwa ihe nkiri nitride. Egbe cathode oghere bụ ma isi iyi vaporization, Isi iyi ọzọ nke ionization. N'oge mkpuchi, a kwesịkwara ịgbanwe ọkụ eletrik gburugburu crucible. Lekwasị anya na etiti nke ọdịda ahụ, Ya mere, a na-amụba njupụta ike nke mmiri elektrọn.

9, Gbanyụọ Ike. Mgbe ọkpụrụkpụ ihe nkiri ahụ ruru ọkpụrụkpụ ihe nkiri a kapịrị ọnụ, gbanyụọ ọkụ eletrik arc, ọkụ eletrik na ikuku na-enye.