Uburyo bwo gusiga irangi rya cathode ion ni ubu bukurikira:
1. Shyira ingots z'urushinge mu gipfundikizo.
2. Gushyiramo igikoresho.
3. Nyuma yo kuva kuri 5×10-3Pa, gaze ya argon yinjizwa mu cyumba cyo gusigamo iva mu muyoboro wa silver, kandi urwego rw'umwuka uvamo umwuka ni hafi 100Pa.
4. Fungura imbaraga zo gutandukanya ibintu.
5. Nyuma yo gucana imbaraga za arc kugira ngo ucane umuyoboro wa cathode udafite aho uboshye. Umuyoboro w'urumuri usohoka mu muyoboro w'amabutoni, voltage yo gusohora ni 800 ~ 1000V, umuyoboro wo kuzamura arc ni 30 ~ 50A. Bitewe n'ingaruka za cathode zidafite aho ziboshye zo gusohora urumuri, ubucucike bw'umuyoboro w'urumuri ukabije, ubucucike bwinshi bwa ions z'imbeba mu muyoboro w'ifeza butera urukuta rw'umuyoboro w'amashanyarazi, butuma urukuta rw'umuyoboro rushyuha vuba kugeza ku isohoka ry'amashanyarazi, uburyo bwo gusohora urumuri buhinduka mu buryo butunguranye bujya ku isohoka ry'umuyoboro, Voltage ni 40 ~ 70V, Umuyoboro w'amashanyarazi ni 80 ~ 300A. Ubushyuhe bw'umuyoboro w'ifeza bugera hejuru ya 2300K, Incandescent, Isohora umuyoboro mwinshi wa electron z'imbeba uva mu muyoboro, hanyuma ikagera kuri anode.
6. Guhindura urwego rw'umwuka uva mu kirere. Urwego rw'umwuka uva mu kirere uva mu mbunda ifite ubushyuhe ni 100 Pa, naho urwego rw'umwuka uva mu kirere ni 8 × 10-1 ~ 2 Pa. Bityo, nyuma yo gutwika umuyaga uva mu kirere, gabanya gazi ya argon yinjira vuba bishoboka, hindura urwego rw'umwuka uva mu kirere ku rugero rukwiriye gusiga.
7. Urusobe rw'ibanze rwa Titanium. Electron inyura mu cyuma cya Chin cyaguye nabi, Ihinduka ry'ingufu za kinetiki mu ngufu z'ubushyuhe, Guhinduka kw'icyuma cya Chin binyuze mu gushyushya, Atome z'umwuka zigera ku gice cy'akazi kugira ngo zikore filime ya titanium.
8. Gushyira TiN mu mwanya wayo. Gazi ya azote ishyirwa mu cyumba cyo gutwikira, Gazi ya azote na atome zavuye mu mwuka zishyirwa muri azote na titaniyumu. Hejuru y'aho icyuma gishongeshejwe, amahirwe menshi yo kugongana kwa atome za titaniyumu n'imigezi myinshi ya electron nkeya, Igipimo cyo kwitandukanya kw'icyuma kiri hejuru ya 20% ~ 40%., Izoni za titaniyumu zishobora gukorana na azote mu buryo bwa shimi, Gushyiramo kugira ngo haboneke urwego rwa nitride mantle film. Imbunda ya cathode ifite ubushyuhe ni isoko y'umwuka, Indi soko y'umwuka. Mu gihe cyo gutwikira, umuriro wa coil ya electromagnetic izengurutse icyuma gishongeshejwe nawo ugomba guhindurwa, Kwibanda ku munwa wa electron hagati mu gihe cyo kugwa, Bityo, ubucucike bw'imbaraga za electron buriyongereye.
9、Guzimya umuriro. Nyuma y'uko ubugari bwa filime bugeze ku bunini bwa filime bwagenwe, zimya umuriro w'amashanyarazi wa arc、umuriro wa Bias n'umwuka.
Igihe cyo kohereza: Nyakanga-08-2023