Tsarin shafa ion na cathode mai rami kamar haka:
1. Sanya ƙurar Chin a cikin rugujewar.
2, Shigar da kayan aikin.
3, Bayan an kwashe shi zuwa 5 × 10-3Pa, ana shigar da iskar argon a cikin ɗakin rufewa daga bututun azurfa, kuma matakin injin yana kusa da 100Pa.
4. Kunna ƙarfin son zuciya.
5, Bayan kunna wutar baka don kunna fitar da cathode mai rami. Ana samar da fitar da haske a cikin bututun maɓalli, ƙarfin fitarwa shine 800 ~ 1000V, wutar da ke tayar da baka shine 30 ~ 50A. Saboda tasirin cathode mai rami na fitar da haske, yawan fitar da haske mai yawa, yawan ions na bera a cikin bututun azurfa yana mamaye bangon bututun vantage, Sanya bangon bututun ya yi zafi da sauri har zuwa fitar da kwararar electron, yanayin fitarwa daga fitar da haske ya canza kwatsam zuwa fitar da baka, Wutar lantarki shine 40 ~ 70V, halin yanzu shine 80 ~ 300A. Zafin bututun azurfa ya kai sama da 2300K, Incandescent, Yana fitar da kwararar electrons mai yawa daga bututun, sannan a harba shi zuwa anode.
6, Daidaita matakin injin tsabtace iska. Matsayin injin tsabtace iska don fitar da haske daga bindigar cathode mai rami shine kusan Pa 100, Kuma matakin injin tsabtace iska shine Pa 8 × 10-1 ~ 2. Saboda haka, Bayan kunna fitar da iskar gas, Rage iskar argon da ke shigowa da wuri-wuri, Daidaita matakin injin tsabtace iska zuwa kewayon da ya dace da rufin.
7, Layer ɗin tushe mai rufi da titanium. Guduwar lantarki zuwa cikin ingot ɗin ƙarfe na Chin wanda ya lalace ta hanyar anod, Canza kuzarin motsi zuwa makamashin zafi, Tururin ƙarfe na Chin ta hanyar dumama, ƙwayoyin tururi suna isa wurin aiki don samar da fim ɗin titanium.
8, Ajiye TiN. Ana samar da iskar nitrogen zuwa ɗakin rufewa, iskar nitrogen da atom ɗin da aka ƙafe suna ion zuwa ions na nitrogen da titanium. Sama da bututun, Babban yuwuwar karo na inelastic na atom ɗin tururin titanium tare da ƙoramu masu yawa na electrons masu ƙarancin kuzari, Yawan rabuwar ƙarfe yana da kusan 20% ~ 40%., ions na titanium suna da yuwuwar yin martani ta hanyar sinadarai tare da nitrogen na iskar gas, Ajiyewa don samun layin fim na nitride. Gun ɗin cathode mai rami duka tushen tururi ne, Wani tushen ionization. A lokacin rufewa, Ya kamata a daidaita wutar lantarki ta coil da ke kewaye da bututun, Mayar da hankali kan hasken electron zuwa tsakiyar rushewar, Don haka, yawan ƙarfin kwararar electron yana ƙaruwa.
9, Kashe Wuta. Bayan kauri fim ɗin ya kai kauri da aka ƙayyade, kashe wutar lantarki ta baka, samar da wutar lantarki da iska mai ƙarfi.
Lokacin Saƙo: Yuli-08-2023