Ko te tukanga o te paninga katote tuwhera koia tēnei:
1, Tāpirihia ngā poro kauae ki roto i te papa whakahoro.
2. Te whakairi i te mea mahi.
3, Whai muri i te nekehanga ki te 5 × 10-3Pa, ka whakaurua te hau argon ki roto i te rūma paninga mai i te ngongo hiriwa, ā, ko te taumata korehau he tata ki te 100Pa.
4、Whakakāhia te mana whakahāngai.
5, Whai muri i te tahuritanga o te mana pewa hei whakakā i te tukunga katote tuwhera. Ka puta te tukunga kanapa i roto i te ngongo pātene, Ko te ngaohiko tukunga he 800~1000V, Ko te iahiko whakaara-pewa he 30~50A. Nā te pānga katote tuwhera o te tukunga kanapa, He nui te kiato o te iahiko tukunga kanapa, Ko te kiato nui o ngā katote kiore i roto i te ngongo hiriwa ka pupuhi i te pakitara o te ngongo tirohanga, Ka tere te mahana o te pakitara ngongo ki te tukunga o te rere irahiko, ka huri ohorere te aratau tukunga mai i te tukunga kanapa ki te tukunga pewa, Ko te ngaohiko he 40~70V, Ko te iahiko he 80~300A. Ka eke te pāmahana o te ngongo hiriwa ki runga ake i te 2300K, He kanapa, Ka tukuna he rerenga kiato teitei o ngā irahiko pewa mai i te ngongo, ka pupuhi ki te anode.
6, Te whakatikatika i te taumata korehau. Ko te taumata korehau mō te tukunga kanapa mai i te pū katote tuwhera he tata ki te 100 Pa, ā, ko te tohu paninga korehau he 8 × 10-1 ~ 2Pa. Nō reira, i muri i te mura o te tukunga pewa, Whakaitihia te hau argon e haere mai ana i te wā e taea ai, Whakatikatikahia te taumata korehau ki te awhe e tika ana mō te paninga.
7, Paparanga turanga whakakikoruatia ki te titanium. Te rere o te irahiko ki runga i te konganuku Chin kua hinga anodically, Te hurihanga o te kaha nekeneke ki te kaha wera, Te mimiti o te konganuku Chin mā te whakamahana, Ka tae ngā ngota kohu ki te wahi mahi hei hanga i te kiriata titanium.
8、Te whakatakotoranga o te TiN. Ka tukuna te hau hauota ki te rūma paninga, ka whakakorikoria te hau hauota me ngā ngota mimiti ki ngā ngota hauota me te titanium. I runga ake i te oko, he nui ake te tūponotanga o ngā tukinga kore-whakapūmau o ngā ngota kohu titanium me ngā rerenga matotoru o ngā irahiko iti-pūngao, ko te tere wehenga whakarewa he teitei ki te 20% ~ 40%., he nui ake te tūponotanga o ngā katote titanium ki te tauhohenga matū ki te hau hauota tauhohenga, te whakatakotoranga hei whiwhi i te paparanga kiriata nitride. Ko te pū cathode tuwhera he pūtake mimiti, tētahi atu pūtake o te whakakorikori. I te wā paninga, me whakarite hoki te ia o te koiri hiko huri noa i te oko, arotahi te hihi irahiko ki waenganui o te hinganga, nō reira, ka piki ake te kaha o te rere o te irahiko.
9, Whakawetohia te mana. Kia tae te matotoru o te kiriata ki te matotoru kua whakaritea, whakawetohia te mana hiko pewa, te mana hiko whakahāngai me te mana hau.
Wā tuku: Hōngongoi-08-2023