Maitiro ekuvhara ion ye cathode isina chinhu ndeaya anotevera:
1. Isa ma ingots echirebvu mugomba.
2, Kuisa workpiece.
3. Mushure mekubuda kuenda ku5×10-3Pa, gasi reargon rinopinzwa mukamuri rekufukidza kubva muchubhu yesirivha, uye mwero wevacuum cleaner uri pa100Pa.
4. Batidza simba rekusarudza zviri kukanganiswa.
5. Mushure mekubatidza simba re arc kuti ubatidze hollow cathode discharge. Glow discharge inogadzirwa mu button tube, Discharge voltage i800~1000V, arc-raising current i30~50A. Nekuda kwe hollow cathode effect yekuburitsa glow, High glow discharge current density, High density yema rat ions mu silver tube inoputira madziro e vantage tube, Inoita kuti madziro e tube adziye nekukurumidza kusvika pakubuda kwema electron flow, discharge mode kubva pakuburitsa glow discharge inoshanduka kamwe kamwe kuenda ku arc discharge, Voltage i40~70V, Current i80~300A. Tembiricha ye Silver tube inosvika pamusoro pe 2300K, Incandescent, Inoburitsa high density stream yema arc electrons kubva mu tube, uye inopfura kuenda ku anode.
6. Kugadziriswa kwehuwandu hwevacuum. Huwandu hwevacuum hwekuburitsa chiedza kubva mugomba re cathode hunosvika 100 Pa, uye huwandu hwevacuum hwekuputira i8 × 10-1 ~ 2Pa. Saka, mushure mekubatidza arc discharge, Deredza argon gasi rinouya nekukurumidza, Gadzirisa huwandu hwevacuum kuti huve panzvimbo yakakodzera yekuputira.
7. Titanium plated base layer. Electron inoyerera ichienda kusimbi yeChin inodonha, kushandurwa kwesimba rekinetic kuita simba rekupisa, Kubuda kwesimbi yeChin nekupisa, Maatomu emhepo anosvika pabasa kuti agadzire firimu retitanium.
8、Kubviswa kweTiN. Gasi reNitrogen rinoendeswa kuimba yekuputira, gasi reNitrogen uye maatomu akapwanyika anoiswa ion kuita nitrogen netitanium ions. Pamusoro pecrucible, Mikana yakakwira yekubonderana kwemaatomu etitanium vapor nenzizi dzakakora dzemaerekitironi ane simba shoma, Mwero wekupatsanurwa kwesimbi wakakwira kusvika 20% ~ 40%., Maion eTitanium ane mukana wekuita zvemakemikari nereaction gas nitrogen, Kubviswa kuti uwane nitride mantle film layer. Pfuti ye cathode hollow ndiyo sosi yekuvapo kwemhepo, Imwe sosi yeionization. Munguva yekuputira, Current ye electromagnetic coil yakatenderedza crucible inofanirawo kugadziriswa, Tarisa danda re electron pakati pekudonha, Saka, simba rekuyerera kwemaerekitironi rinowedzerwa.
9、Kudzima. Kana ukobvu hwefirimu hwasvika pakukora kwefirimu kwakatarwa, Dzima simba remagetsi re arc、Bias power supply uye mweya.
Nguva yekutumira: Chikunguru-08-2023