Inqubo ye-hollow cathode ion coating imi kanje:
1, Faka ama-Chin ingots ekugoqeni.
2, Ukukhweza i-workpiece.
3, Ngemva kokuthuthela ku-5 × 10-3Pa, igesi ye-argon ingeniswa ekamelweni lokumboza lisuka kushubhu yesiliva, futhi izinga le-vacuum lizungeze i-100Pa.
4.Vula amandla okuchema.
5, Ngemva kokuvula amandla e-arc ukuze uthungele ukukhishwa kwe-cathode engenalutho. Ukukhishwa okukhanyayo kukhiqizwa epayipini lenkinobho, I-voltage yokukhipha ingu-800 ~ 1000V, i-arc-raising current ingu-30 ~ 50A.Ngenxa yomphumela we-cathode ongenalutho wokuphuma kokukhanya, ukuminyana okuphezulu kokuphuma kwesiliva ibhomuza udonga lweshubhu ye-vantage, Yenza udonga lweshubhu lufudumale ngokushesha lufinyelele ekuphumeni kwe-electron, imodi yokukhipha isuka ekuphumeni okukhanyayo ishintshe ngokuzumayo ibe yi-arc discharge, I-Voltage ingu-40 ~ 70V, Yamanje ingu-80~300A. Izinga lokushisa leshubhu lesiliva lifinyelela ngaphezu kuka-2300K, i-Incandescent ye-electron idubula ukwehla, ne-Emits i-anode.
6, Ukulungiswa kwezinga le-vacuum.Izinga lokukhishwa kwe-vacuum lokukhishwa okukhanyayo kusuka kusibhamu se-cathode esingenalutho lingaba ngu-100 Pa,Futhi idigri ye-vacuum ye-coating ingu-8×10-1~2Pa.Ngakho-ke,Ngemva kokushiswa kokukhishwa kwe-arc, Yehlisa igesi ye-argon engenayo ngokushesha ngangokunokwenzeka,Lungisa uhla olufanele.
7, I-Titanium plated base layer.I-Electron igeleza ingena engosini yensimbi egoqeke ngendlela engavamile, Ukuguqulwa kwamandla e-kinetic abe amandla ashisayo, Ukuhwamuka kwensimbi yesilevu ngokushisisa, ama-athomu omhwamuko afinyelela endaweni yokusebenza ukuze akhe ifilimu ye-titanium.
8, Ukubekwa kwe-TiN. Igesi ye-nitrogen inikezwa ekamelweni lokumboza, igesi ye-nitrogen nama-athomu ahwamukile afakwa ionized abe yi-nitrogen ne-titanium ion.Ngaphezu kwe-crucible, Amathuba aphezulu okushayisana kwe-inelastic yama-athomu omphunga we-titanium anemifudlana eminyene ye-low-energy asciation asciation 20%~40%.,Ama-ion e-Titanium maningi amathuba okuba asabele ngamakhemikhali ne-reaction gas nitrogen,Ukubekwa ukuze kutholwe ungqimba lwefilimu ye-nitride mantle.Isibhamu se-cathode esingenalutho siwumthombo wokuhwamuka,Omunye umthombo we-ionization.Ngesikhathi sokumboza,Umthamo wekhoyili kamagnetic ezungeze i-crucible kufanele futhi ilungiswe phakathi kwe-bellapse,Focus the power, ukuminyana kokugeleza kwe-electron kuyanda.
9, Ukucisha Amandla.Ngemva kokuba ukushuba kwefilimu kufinyelele ubukhulu befilimu obunqunywe kusengaphambili, Vala ukunikezwa kwamandla kwe-arc, ukunikezwa kwamandla kwe-Bias kanye nokunikezwa komoya.
Isikhathi sokuthumela: Jul-08-2023