Itekhnoloji yokugquma nge-vacuum yaziwa kakhulu ngokuba nobuhlobo nokusingqongileyo, ukusebenza kakuhle, ukufana kwefilimu okugqwesileyo, kunye noxinano oluphezulu lwefilimu. Kwimisebenzi yemizi-mveliso, izixhobo zokugquma nge-vacuum zihlala zahlulwe zibe ziindidi ezimbini eziphambili: Ukugquma nge-Physical Vapor (PVD) kunye nokugquma nge-Chemical Vapor (CVD).
Iinkqubo zokuSuswa koMphunga oPhilayo (i-PVD) ziquka ubuchwephesha bokufuma, ukutshiza, kunye nobuchwepheshe bokutshiza i-ion. Iinkqubo zokutshiza umphunga zisebenzisa iindlela ezahlukeneyo zokufudumeza ukuze zitshise izixhobo zokutshiza, ezifana nokutshiza kokumelana nokufuma, ukutshiza kwe-electron beam (i-E-beam), ukutshiza kokungenisa umoya, kunye nokutshiza i-arc. Iinkqubo zokutshiza umphunga, kwelinye icala, zixhomekeke ekukhutshweni kwe-atom ejoliswe kwi-plasma kwaye ziquka ukutshiza ngqo (DC), ukutshiza kwerediyo (RF), ukutshiza kwe-magnetron, kunye neenkqubo zokutshiza ezisebenzayo. Iinkqubo zokutshiza i-ion zidityanisa i-plasma kunye neendlela zokutshiza okanye zokutshiza ukuphucula ukunamathela kwefilimu kunye noxinano, kunye neetekhnoloji eziqhelekileyo kubandakanya ukutshiza i-arc ion plating ye-cathodic, ukutshiza i-ion plating ye-magnetron, kunye nokutshiza i-ion plating engenanto.
Iinkqubo zeChemical Vapor Deposition (CVD) zibandakanya ii-chemical reactions ze-gaseous precursors ukuze zenze iifilimu eziqinileyo eziqinileyo kwiindawo ezingaphantsi komhlaba. Iiteknoloji eziqhelekileyo zeCVD ziquka i-Atmospheric Pressure Chemical Vapor Deposition (APCVD), i-Low Pressure Chemical Vapor Deposition (LPCVD), i-Plasma Enhanced Chemical Vapor Deposition (PECVD), i-Metal-Organic Chemical Vapor Deposition (MOCVD), kunye ne-Atomic Layer Deposition (ALD), nganye ifanelekile kwiinkqubo ezahlukeneyo zezinto kunye neemfuno zenkqubo.
Iitekhnoloji zokugquma nge-vacuum zisetyenziswa kakhulu kumacandelo amaninzi ahlukeneyo, kuquka ukwenziwa kweemoto, izixhobo ze-elektroniki kunye nezixhobo ze-elektroniki zabathengi (ezifana neefowuni eziphathwayo), izixhobo ze-semiconductor, izixhobo zasekhaya, izixhobo zangasese, iimveliso zeekhemikhali zemihla ngemihla, izinto zokuhombisa, kunye nezixhobo zefilimu eziguquguqukayo.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha lokuthumela: Epreli-02-2026