Ua ʻike nui ʻia ka ʻenehana uhi vacuum no kona ʻoluʻolu i ke kaiapuni, ka pono kiʻekiʻe, ke ʻano like o ka ʻiliʻili maikaʻi loa, a me ka nui o ka ʻiliʻili. I nā noi ʻoihana, ua hoʻokaʻawale pinepine ʻia nā lako uhi vacuum i ʻelua mau māhele nui: Physical Vapor Deposition (PVD) a me Chemical Vapor Deposition (CVD).
ʻO nā ʻōnaehana hoʻokaʻawale mahu kino (PVD) e komo pū me nā ʻenehana hoʻoheheʻe ʻana, sputtering, a me ka ion plating. Hoʻohana nā ʻōnaehana uhi hoʻoheheʻe i nā ʻano hoʻomehana like ʻole e hoʻoheheʻe i nā mea uhi, e like me ka hoʻomehana kū'ē ʻana i ka hoʻoheheʻe ʻana, ka hoʻoheheʻe ʻana o ke kukuna uila (E-beam), ka hoʻomehana hoʻokomo ʻana, a me ka hoʻoheheʻe ʻana o ke arc. Ma ka ʻaoʻao ʻē aʻe, hilinaʻi nā ʻōnaehana uhi sputtering i ka plasma-induced atom ejection a hoʻokomo pū me ka sputtering o ke au pololei (DC), ka sputtering alapine radio (RF), ka magnetron sputtering, a me nā kaʻina hana sputtering reactive. Hoʻohui nā ʻōnaehana plating Ion i nā ʻano plasma a me ka hoʻoheheʻe ʻana a i ʻole sputtering e hoʻomaikaʻi i ka hoʻopili ʻana o ke kiʻiʻoniʻoni a me ka density, me nā ʻenehana maʻamau e komo pū ana me ka cathodic arc ion plating, magnetron sputtering ion plating, a me ka hollow cathode ion plating.
Hoʻokomo nā ʻōnaehana Chemical Vapor Deposition (CVD) i nā hopena kemika o nā precursors gaseous e hana i nā ʻili lahilahi paʻa ma nā ʻili substrate. ʻO nā ʻenehana CVD maʻamau e komo pū me ka Atmospheric Pressure Chemical Vapor Deposition (APCVD), Low Pressure Chemical Vapor Deposition (LPCVD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Metal-Organic Chemical Vapor Deposition (MOCVD), a me Atomic Layer Deposition (ALD), i kūpono i nā ʻōnaehana mea like ʻole a me nā koi hana.
Hoʻopili nui ʻia nā ʻenehana uhi vacuum ma nā ʻano ʻoihana like ʻole, me ka hana ʻana i nā kaʻa, nā mea uila a me nā mea uila mea kūʻai aku (e like me nā kelepona akamai), semiconductors, nā lako home, nā mea hoʻomaʻemaʻe, nā huahana kemika o kēlā me kēia lā, nā ʻāpana hoʻonaninani, a me nā mea ʻoniʻoni maʻalahi.
-Ua paʻi ʻia kēia ʻatikala emea hana lako uhi vacuumʻO Zhenhua Vacuum
Ka manawa hoʻouna: ʻApelila-02-2026