Theknoloji ea ho koahela ka vacuum e tsebahala haholo ka botsoalle ba eona tikolohong, bokhoni bo phahameng, ho tšoana hantle ha filimi, le bongata bo phahameng ba filimi. Litšebelisong tsa indasteri, lisebelisoa tsa ho koahela ka vacuum hangata li arotsoe ka mekhahlelo e 'meli e meholo: Ho tlosoa ha mouoane ka mokhoa oa 'mele (PVD) le ho tlosoa ha mouoane ka lik'hemik'hale (CVD).
Mekhoa ea ho tlosa mouoane ka 'mele (PVD) e kenyelletsa ho fetoha mouoane, ho qhala, le theknoloji ea ho qhala li-ion. Mekhoa ea ho qhala mouoane e sebelisa mekhoa e fapaneng ea ho futhumatsa ho etsa hore thepa ea ho qhala e be mouoane, joalo ka ho fetoha mouoane ha mocheso o hanyetsanang, ho fetoha mouoane ha mahlaseli a electron (E-beam), ho fetoha mouoane ha mocheso o kenang, le ho fetoha mouoane ha arc. Mekhoa ea ho qhala li-sputtering, ka lehlakoreng le leng, e itšetlehile ka ho tlosoa ha athomo e bakoang ke plasma 'me e kenyelletsa ho qhala ha motlakase o tobileng (DC), ho qhala ha maqhubu a seea-le-moea (RF), ho qhala ha magnetron, le mekhoa ea ho qhala e arabelang. Mekhoa ea ho qhala li-ion e kopanya plasma le mekhoa ea ho qhala kapa ho qhala ho ntlafatsa ho khomarela le ho teteana ha filimi, ka mahlale a tloaelehileng a kenyeletsang ho qhala ha li-ion tsa arc tsa cathodic, ho qhala ha li-ion tsa magnetron tsa sputtering, le ho qhala ha li-ion tsa cathode tse se nang letho.
Mekhoa ea ho Hlahisa Mouoane oa Lik'hemik'hale (CVD) e kenyelletsa liketso tsa lik'hemik'hale tsa lintho tse ka pele ho khase ho etsa lifilimi tse tšesaane tse tiileng holim'a libaka tsa substrate. Mekhoa e tloaelehileng ea CVD e kenyelletsa Khatello ea Sepakapaka ea Khatello ea Lik'hemik'hale ea Mouoane (APCVD), Khatello e Tlase ea Khatello ea Lik'hemik'hale ea Mouoane (LPCVD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Tšepe-Organic Chemical Vapor Deposition (MOCVD), le Atomic Layer Deposition (ALD), e 'ngoe le e 'ngoe e loketse litsamaiso tse fapaneng tsa thepa le litlhoko tsa ts'ebetso.
Mahlale a ho koahela ka vacuum a sebelisoa haholo indastering e mengata, ho kenyeletsoa tlhahiso ea likoloi, lisebelisoa tsa elektroniki le lisebelisoa tsa elektroniki tsa bareki (joalo ka li-smartphone), li-semiconductor, lisebelisoa tsa lapeng, lisebelisoa tsa bohloeki, lihlahisoa tsa lik'hemik'hale tsa letsatsi le letsatsi, likarolo tsa mekhabiso le thepa ea lifilimi e tenyetsehang.
-Sengoloa sena se phatlalalitsoe kemoetsi oa lisebelisoa tsa ho roala ka vacuumLetsoho la Zhenhua
Nako ea poso: Mmesa-02-2026