Ngā momo taputapu paninga korehau

E mōhiotia whānuitia ana te hangarau paninga korehau mō tōna āhua pai ki te taiao, tōna whai huatanga nui, tōna ōritetanga kiriata pai rawa atu, me tōna matotoru kiriata pai rawa atu. I roto i ngā mahi ahumahi, ka whakarōpūtia ngā taputapu paninga korehau ki ngā wāhanga matua e rua: Te Whakatakotoranga Kohu Tinana (PVD) me te Whakatakotoranga Kohu Matū (CVD).

Kei roto i ngā pūnaha Whakatakotoranga Kohu Tinana (PVD) ngā hangarau mimiti, te pupuhi, me te whakakikorua katote. Ka whakamahia e ngā pūnaha whakakikorua mimiti ngā tikanga whakamahana maha hei mimiti i ngā rauemi whakakikorua, pērā i te mimiti whakamahana ātete, te mimiti hihi irahiko (E-beam), te mimiti whakamahana arataki, me te mimiti pewa. I tētahi atu taha, ka whakawhirinaki ngā pūnaha whakakikorua pupuhi ki te pana ngota whainga i puta mai i te plasma, ā, kei roto ko te pupuhi iahiko tika (DC), te pupuhi auau reo irirangi (RF), te pupuhi magnetron, me ngā tukanga pupuhi tauhohe. Ka whakakotahi ngā pūnaha whakakikorua katote i ngā tikanga plasma me te mimiti, te pupuhi rānei hei whakarei ake i te piri me te mātotoru o te kiriata, me ngā hangarau noa tae atu ki te whakakikorua i te pewa katote ...

Ko ngā pūnaha Whakatakotoranga Kohu Matū (CVD) e uru ana ki ngā tauhohenga matū o ngā matū hau hei hanga i ngā kiriata angiangi totoka ki runga i ngā mata o te papa. Ko ngā hangarau CVD noa ko te Whakatakotoranga Kohu Matū Pēhanga Hauātea (APCVD), te Whakatakotoranga Kohu Matū Pēhanga Iti (LPCVD), te Whakatakotoranga Kohu Matū Whakarei Plasma (PECVD), te Whakatakotoranga Kohu Matū Whakarewa-Waro (MOCVD), me te Whakatakotoranga Papa Atomika (ALD), ia mea e tika ana mō ngā pūnaha rauemi me ngā whakaritenga tukanga rerekē.

E whakamahia whānuitia ana ngā hangarau paninga korehau puta noa i te whānuitanga o ngā ahumahi, tae atu ki te hanga motuka, ngā hikohiko me ngā hikohiko kaihoko (pēnei i ngā waea atamai), ngā haurua-haurua, ngā taputapu kāinga, ngā taputapu akuaku, ngā hua matū o ia rā, ngā wāhanga whakapaipai, me ngā rauemi kiriata ngāwari.

-Nākaihanga taputapu paninga korehauZhenhua Vacuum