Fasahar rufe injin tsotsar na'ura an san ta sosai saboda kyawun muhalli, inganci mai kyau, daidaiton fim mai kyau, da kuma yawan fim mai kyau. A aikace-aikacen masana'antu, galibi ana rarraba kayan rufe injin tsotsar na'ura zuwa manyan rukuni biyu: Fasarar Tururi ta Jiki (PVD) da Fasarar Tururi ta Sinadarai (CVD).
Tsarin Fisika na Vapor Deposition (PVD) ya haɗa da fasahar evaporation, sputtering, da ion plating. Tsarin evaporation na amfani da hanyoyi daban-daban na ɗumama don ƙara yawan kayan shafa, kamar evaporation na juriya na dumama, evaporation na electron beam (E-beam), evaporation na dumama induction, da evaporation na arc. A gefe guda kuma, tsarin spotting na sputtering ya dogara ne akan evaporation na atom da plasma ke haifarwa kuma ya haɗa da sputtering na direct current (DC), sputtering na rediyo (RF), magneticron sputtering, da kuma reactive sputtering. Tsarin ion plating yana haɗa plasma da evaporation ko sputtering hanyoyin don haɓaka mannewa da yawa na fim, tare da fasahohin da aka saba da su ciki har da cathodic arc ion plating, magnetron sputtering ion plating, da hollow cathode ion plating.
Tsarin Tsabtace Tururin Sinadarai (CVD) ya ƙunshi halayen sinadarai na abubuwan da suka fara samar da iskar gas don samar da siraran fim masu ƙarfi a saman substrate. Fasahar CVD da aka saba amfani da ita ta haɗa da Tsabtace Tururin Sinadarai Masu Matsi a Yanayi (APCVD), Tsabtace Tururin Sinadarai Masu Matsi a Ƙasa (LPCVD), Tsabtace Tururin Sinadarai Masu Ingantaccen Jini (PECVD), Tsabtace Tururin Sinadarai Masu Ƙarfi da Ƙarfe (MOCVD), da Tsabtace Layer Atomic (ALD), kowannensu ya dace da tsarin kayan aiki daban-daban da buƙatun tsari.
Ana amfani da fasahar rufe injin tsotsar ruwa sosai a fannoni daban-daban, ciki har da kera motoci, kayan lantarki da na'urorin lantarki na masu amfani da su (kamar wayoyin komai da ruwanka), na'urorin semiconductor, kayan gida, kayan tsafta, kayayyakin sinadarai na yau da kullun, kayan ado, da kayan fim masu sassauƙa.
-An buga wannan labarin ne ta hannunƙera kayan aikin rufin injin injinInjin tsabtace Zhenhua
Lokacin Saƙo: Afrilu-02-2026