Inkqubo yokwaleka kwe-ion cathode

Inkqubo yokugquma i-ion cathode ihambe ngolu hlobo lulandelayo:

1, Beka i-Chin ingots ekuweni.

2. Ukunyuswa kwesixhobo sokusebenza.

3, Emva kokufuduka ukuya ku-5 × 10-3Pa, igesi ye-argon yaziswa kwigumbi lokugquma ukusuka kwityhubhu yesilivere, kwaye inqanaba lokufunxa lijikeleze i-100Pa.

4. Vula amandla okukhetha.

5 ibhobhoza udonga lwetyhubhu yevantage, Yenza udonga lwetyhubhu lufudumale lufudumale lufikelele ekuphumeni kwe-electron, imowudi yokukhupha ukusuka ekuphumeni okukhanyayo utshintsho ngesiquphe ukuya kwi-arc discharge, iVoltage yi-40 ~ 70V, yangoku yi-80 ~ 300A. Ubushushu betyhubhu yesilivere bufikelela ngaphezulu kwe-2300K, i-incandescent ye-elektroni ephuma phezulu, kunye ne-emits ye-elektroni ephezulu i-anode.

6, Ukulungelelaniswa kwenqanaba le-vacuum.Inqanaba lokucoca lokukhutshwa okukhanyayo kwi-cathode gun limalunga ne-100 Pa,Kwaye iqondo le-vacuum yokugquma yi-8×10-1 ~ 2Pa.Ngoko ke,Emva kokulayita ukukhutshwa kwe-arc,Nciphisa igesi ye-argon engenayo ngokukhawuleza ukulungelelaniswa komgangatho ofanelekileyo,Lungisa i-vacuum ye-vacuum ngokukhawuleza.

I-7, i-Titanium plated base layer.I-Electron igeleza kwi-ingot yentsimbi ye-Chin edilikileyo, Ukuguqulwa kwamandla e-kinetic ukuya kumandla obushushu, ukuPhuphuma kwentsimbi ye-Chin ngokufudumeza, iiathom zomphunga zifikelela kwindawo yokwenza ifilimu ye-titanium.

8, Ukubekwa kwe-TiN. Irhasi yeNitrojeni inikezelwa kwigumbi lokugquma, igesi yeNitrojeni kunye neeathom ezingumphunga zifakwa ionized ibe yinitrogen kunye ne-titanium ion. Ngaphezulu kwe-crucible, amathuba aphezulu okungqubana kwe-inelastic yee-athom zomphunga we-titanium kunye nemisinga eshinyeneyo ye-asciation ye-metal asciation ephezulu. I-20% ~ 40%.,I-ion ze-Titanium ziyakwazi ukusabela kwimichiza kunye ne-nitrogen yegesi yokusabela,Ukubekwa kokufumana umaleko wefilimu ye-nitride mantle.Umpu we-cathode ovulekileyo zombini ngumthombo womphunga,Omnye umthombo we-ionization.Ngexesha lokugquma,Umjelo wecoil ye-electromagnetic ejikeleze i-crucible kufuneka ilungelelaniswe nombindi we-electron. Ubuninzi bokuhamba kwe-electron buyanda.

9, Power Off.Emva kokuba ubukhulu befilimu bufikelele kubukhulu befilimu obumiselwe kwangaphambili, Cima unikezelo lwamandla e-arc, unikezelo lwamandla lweBias kunye nonikezelo lomoya.