Ts'ebetso ea ho roala ion ea cathode e sekoti ke e latelang:
1, Kenya li-ingots tsa Chin ho putlama.
2. Ho phahamisa sesebedisoa.
3, Ka mor'a ho falla ho 5 × 10-3Pa, khase ea argon e kenngoa ka kamoreng ea ho roala ho tloha ka tube ea silevera, 'me boemo ba vacuum bo pota-potile 100Pa.
4. Bulela matla a leeme.
5, Kamora ho bulela matla a arc ho hotetsa phallo ea cathode e se nang letho. Phallo e khanyang e hlahisoa ka har'a konopo ea konopo, "Discharge voltage" ke 800 ~ 1000V, The arc-raising current ke 30 ~ 50A. E etsa hore lebota la tube le futhumale ka potlako ho fihlela phallo ea elektronike e tsoa, mokhoa oa ho tsoa ho tloha ho khanya o fetoha ka tšohanyetso ho ea ho arc discharge, Voltage ke 40 ~ 70V, Hona joale ke 80 ~ 300A. mocheso oa tube oa silevera o fihla ka holimo ho 2300K, Incandescent ea electron ho ea ho theolelo e phahameng. anode.
6、 Phetoho ea boemo ba vacuum. Boemo ba vacuum bakeng sa ho ntša khanya ho tloha sethunya sa cathode se sekoti ke hoo e ka bang 100 Pa, 'me tekanyo ea vacuum ea ho roala ke 8×10-1 ~ 2Pa.Ka lebaka leo, Ka mor'a ho khantšoa ha arc, Fokotsa khase ea argon e kenang kapele kamoo ho ka khonehang, Fetola sebaka se loketseng sa vacuum.
7, Titanium plated base layer.Elektrone e phalla holim'a sesebelisoa sa tšepe se sothehileng ka mokhoa o sa tloaelehang, Phetoho ea matla a kinetic ho matla a futhumetseng, Mouoane oa tšepe ea Chin ka ho futhumatsa, liathomo tsa Mouoane li fihla ho workpiece ho etsa filimi ea titanium.
8, Khase ea TiN. Nitrogen e fanoa ka kamoreng ea ho roala, khase ea Nitrogen le liathomo tse fetohang mouoane li kenngoa ka ionized ho naetrojene le titanium ion.Ka holim'a crucible, monyetla o phahameng oa ho thulana ha inelastic ea athomo ea mouoane ea titanium le melapo e teteaneng ea matla a tlaase a asciation ea tšepe e phahameng. 20% ~ 40%., Li-ion tsa Titanium li na le menyetla e mengata ea ho itšoara ka lik'hemik'hale ka khase ea naetrojene, ho fumana lesela la filimi ea nitride. The hollow cathode gun ke mohloli oa mouoane, mohloli o mong oa ionization. matla a phallo ea elektronike a eketseha.
9 、 Power Off
Nako ea poso: Jul-08-2023