Habka dahaarka ion cathode godan

Habka dahaarka godan ee cathode ion waa sida soo socota:

1. Ku rid Chin ingots burburka.

2. Kordhinta qalabka shaqada.

3. Ka dib markii daadgureynta si 5 × 10-3Pa, gaaska argon waxaa lagu soo bandhigay qolka daahan ka tube lacagta, iyo heerka vacuum waa agagaarka 100Pa.

4. Daar awoodda eexda.

5, Ka dib markii uu shido awoodda arc si ay u shido dheecaanka cathode godan tube vantage, Samee derbiga tube si degdeg ah u diiri ilaa qiiqa qulqulka elektarooniga ah, habka dheecaan ka dheecaanka dhalaalaysa isbedel lama filaan ah in dheecaanka arc, Voltage waa 40 ~ 70V, Hadda waa 80 ~ 300A

6, hagaajinta heerka vacuum. Heerka vacuum ee dheecaan dhaldhalaalaan ka gun cathode godan ku saabsan yahay 100 Pa, Oo degree vacuum ee daahan waa 8 × 10-1 ~ 2Pa.Sidaas darteed, ka dib markii shido ee dheecaanka arc, Yaree gaaska argon soo socda sida ugu dhakhsaha badan ee suurtogalka ah, hagaajin daahan heerka vacuum ah.

7, Titanium dahaadhay salka lakabka.Electron socodka gal bir anodically burburay Chin ingot, Beddelka tamarta kinetic in tamarta kulaylka, uumi biraha Chin by kululaynta, atamka uumiga gaadho workpiece ah si ay u sameeyaan filim titanium ah.

8, Deposition of gaaska TiN.Nitrogen waxaa la siiyaa qolka daahan, gaaska Nitrogen iyo atamka uumi baxay waxaa ionized galay nitrogen iyo ion titanium.Above ah crucible ah, itimaalka sare ee shilalka inelastic ee atamka uumiga titanium la durdurrada cufan ee electrons tamarta hoose sida heerka sare u kaca. 20% ~ 40%, Titanium ions waxay u badan tahay in ay falcelin kiimikaad ah oo leh nitrogen gaaska falcelinta, Deposition si aad u hesho lakabka filimka nitride mantle. Gun cathode godan waa isha uumiga ah, Ilaha kale ee ionization. Inta lagu jiro daahan, Hadda ee gariiradda electromagnetic agagaarka crucible ah waa in sidoo kale la hagaajiyo, Diirada kororka korontadu ee korontadu ee korontadu waa in la burburiyo xarunta dhexe ee electron ah. waa la kordhiyaa.

9. Power Off.Ka dib markii dhumucdiisuna waxay filimka gaadho dhumucdiisuna waxay hore u filimka, Demi sahayda arc, sahayda korantada eexda iyo sahayda hawada.