Maitiro ehollow cathode ion coating

Maitiro ehollow cathode ion coating ndeaya anotevera:

1, Isa Chin ingots mukudonha.

2, Kuisa workpiece.

3, Mushure mekubuda kuenda ku5 × 10-3Pa, argon gasi inounzwa mukamuri yekuputira kubva kune sirivheri chubhu, uye vacuum level iri kutenderera 100Pa.

4.Batidza simba rekurerekera.

5,Mushure mekubatidza arc simba rekubatidza buri cathode discharge.Kupenya kunobuda mubhatani chubhu,Discharge voltage i800~1000V,The arc-raising current is 30~50A.Nekuda kwehollow cathode mhedzisiro yekupenya,kupenya kwechubhu inoyerera,yakakwirira density inobuda muchubhu. inobhomba madziro echubhu yevantage,Itai kuti chubhu ichidziyirwe nekukurumidza kusvika pakubuda kweelectron kuyerera, kubuda kwemagetsi kubva pakupenya kunoshanduka kushanduka kuita arc discharge,Voltage iri 40~70V,Ikozvino i80~300A.Silver chubhu tembiricha inosvika pamusoro pe2300K,Incandescent inoyerera kubva pakakwirira,Emits ichibva pachubhu inoyerera iyo anode.

6, Kugadziriswa kwevacuum level. The vacuum level yekuvhenekera kubuda kubva mugomba cathode pfuti inenge 100 Pa,Uye vacuum dhigirii yekupotera i8 × 10-1 ~ 2Pa. Naizvozvo, Mushure mekubatidzwa kwearc discharge, Deredza iyo inouya argon gasi nekukurumidza, Rongedza nhanho yevacuum nekukurumidza.

7, Titanium plated base layer.Electron inoyerera ichienda kune anodically akadonha Chin metal ingot,Shanduko yesimba rekinetic kuenda kusimba rinopisa,Kubuda kwesimbi yeChin nekudziisa,Maatomu emhute anosvika pane workpiece kuumba titanium firimu.

8, Kuiswa kweTiN.Nitrogen gasi inopihwa mukamuri yekuputira,Nitrogen gasi uye maatomu evaporated zvinoiswa munitrogen uye titanium ion.Pamusoro peiyo crucible,Mukana wepamusoro wekupokana kweinelastic yetitanium mhute maatomu ane dense hova dzepasi-energy dissosciation. 20% ~ 40%., Titanium ions inowanzoita kemikari nekuita gasi nitrogen, Deposition yekuwana nitride mantle film layer. The hollow cathode pfuti zvese zviri vaporization source, Imwezve inokonzeresa ionization.Panguva yekupfeka, Ikozvino yeelectromagnetic coil yakatenderedza crucible inofanirawo kugadziridzwa pakati peiyo coil, Focus to the coil. density yekuyerera kwe electron inowedzera.

9、Simba Kudzima.Mushure mekukora kwefirimu kwasvika kufanotemerwa firimu ukobvu,Dzima arc simba rekupa,Bias simba rekupa uye mhepo inopihwa.