Indium tin oxide (Indium Tin Oxide, inonzi ITO) ibhendi rakakura, rakanyanya doped n-mhando semiconductor zvinhu, zvine yakakwirira inooneka mwenje transmittance uye yakaderera resistivity maitiro, uye nekudaro anoshandiswa zvakanyanya mumasero ezuva, flat panel anoratidza, electrochromic windows, inorganic uye organic yakaonda-firimu electroluminedescence nezvimwe, ultraviolet divoltaodescence uye mamwe mafoto. nzira dzakawanda dzekugadzirira kwemafirimu eITO, kusanganisira pulsed laser deposition, sputtering, chemical vapor deposition, spray thermal decomposition, sol-gel, evaporation, etc. Pakati pe evaporation nzira, inonyanya kushandiswa ndeye electron beam evaporation.
Pane nzira dzakawanda dzekugadzirira ITO firimu, kusanganisira pulsed laser deposition, sputtering, chemical vapor deposition, spray pyrolysis, sol-gel, evaporation uye zvichingodaro, iyo inonyanya kushandiswa evaporation nzira ndeye electron beam evaporation. Kugadzirira kweEvaporation kwemafirimu eITO kunowanzova nenzira mbiri: imwe ndiyo kushandiswa kwepamusoro-kuchena In, Sn alloy sechinhu chinobva, mumhepo yeokisijeni yemhepo inoputika; chechipiri ndiko kushandiswa kwepamusoro-kuchena In2O3 :, SnO2 musanganiswa sechinhu chinobva chekubuda kwakananga. Kuti ugadzire iyo firimu ine yakakwira transmittance uye yakaderera resistivity, kazhinji inoda yakakwirira substrate tembiricha kana kudikanwa kwekuzotevera kuvharirwa kwefirimu. HR Fallah nevamwe. yakashandisa electron beam evaporation nzira patembiricha yakaderera kuisa ITO mafirimu matete, kudzidza mashandiro eiyo deposition rate, annealing tembiricha uye mamwe maitiro maparamita pane chimiro chefirimu, magetsi uye optical properties. Vakataura kuti kudzikisa deposition rate inogona kuwedzera kutapurirana uye kuderedza resistative yemafirimu akadzika-tembiricha akakura. Kufambiswa kwechiedza chinooneka kunopfuura 92%, uye resistivity ndeye 7X10-4Ωcm. vakanyura mafirimu eITO akakura patembiricha yepakamuri pa 350 ~ 550 ℃, uye vakaona kuti kana tembiricha yakakwira, ndizvo zviri nani midziyo yecrystalline yemafirimu eTO. iyo inooneka chiedza transmittance yemafirimu mushure mekunyura pa550 ℃ i93%, uye saizi yezviyo ingangoita 37nm. iyo plasma-inobatsira nzira inogonawo kuderedza kutonhora kwe substrate panguva yekugadzirwa kwefirimu, iyo inonyanya kukosha pakuumbwa kwefirimu, uye crystallinity ndiyo inonyanya kukosha. Iyo plasma-inobatsirwa nzira inogona zvakare kuderedza substrate tembiricha panguva yekugadzira firimu, uye iyo ITO firimu rinowanikwa kubva kudhizaini rine kuita kwakanaka. iyo resistivity yeITO firimu yakagadzirwa naS. Laux et al. yakaderera zvikuru, 5 * 10- ”Ωcm, uye kutorwa kwechiedza pa 550nm iri pasi pe5%, uye resistative yefirimu uye bandwidth yemaziso inoshandurwawo nekushandura kumanikidzwa kweokisijeni panguva yekuisa.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Mar-23-2024