Intangiriro yo gusiga ikoti rya ITO

Okiside ya Indium tin (Indium Tin Oxide, yitwa ITO) ni ahantu hanini ho gutandukanya amashanyarazi, ibikoresho bya semiconductor byo mu bwoko bwa n bifite dope nyinshi, bifite urumuri rugaragara cyane kandi bifite imiterere yo kugabanya ubukana, bityo bigakoreshwa cyane mu turemangingo tw’izuba, ahantu hagari ho kwerekana urumuri, amadirishya ya electrochromic, electroluminescence inorganic na organic thin-film, laser diodes na ultraviolet detectors n'ibindi bikoresho bya photovoltaic, nibindi. Hari uburyo bwinshi bwo gutegura filime za ITO, harimo pulsed laser deposition, sputtering, chemical vapor deposition, spray thermal decomposition, sol-gel, evaporation, nibindi. Mu buryo bwo evaporation, bukoreshwa cyane ni evaporation ya electron beam.

Hari uburyo bwinshi bwo gutegura filime ya ITO, harimo gushyiramo pulsed laser, sputtering, gushyiramo chemical vapor, spray pyrolysis, sol-gel, evaporation n'ibindi, muri byo uburyo bukoreshwa cyane mu gusohora umwuka ni evaporation ya electron beam. Gutegura evaporation ya filime za ITO ubusanzwe bifite uburyo bubiri: bumwe ni ugukoresha high-purity In, Sn alloy nk'ibikoresho byo gusohora, mu kirere cya ogisijeni kugira ngo evaporation ihinduke; ubwa kabiri ni ugukoresha high-purity In2O3:, SnO2 uruvange nk'ibikoresho byo gusohora umwuka mu buryo butaziguye. Kugira ngo filime ikoreshwe ifite transmission nyinshi kandi iri hasi, muri rusange bisaba ubushyuhe bwinshi cyangwa gukenera annealing ya filime. HR Fallah n'abandi bakoresheje uburyo bwa evaporation ya electron beam ku bushyuhe buke kugira ngo bashyiremo filime nto za ITO, kugira ngo biga ingaruka z'igipimo cyo gushyiramo umwuka, ubushyuhe bwo guteramo umwuka n'ibindi bipimo by'imikorere ku miterere ya filime, imiterere y'amashanyarazi n'iy'urumuri. Bagaragaje ko kugabanya igipimo cyo gushyiramo umwuka bishobora kongera transmission no kugabanya resistivity ya filime zakuze mu bushyuhe buke. Uburyo urumuri rugaragara rurenga 92%, kandi ubushobozi bwo guhangana n’urumuri ni 7X10-4Ωcm. Bafashe filime za ITO zakuriye ku bushyuhe bw’icyumba kuri 350 ~ 550℃, kandi basanze uko ubushyuhe bwo guteranya burushaho kuba bwinshi, ni ko imiterere ya kristali ya filime za ITO irushaho kuba myiza. Uburyo urumuri rugaragara rwa filime nyuma yo guteranya kuri 550℃ ni 93%, kandi ingano y’ibinyampeke ni hafi 37nm. Uburyo bufashijwe na plasma bushobora kandi kugabanya ubushyuhe bwa substrate mu gihe cyo gukora filime, ari na cyo kintu cyingenzi mu gukora filime, kandi kristali nayo ni ingenzi cyane. Uburyo bufashijwe na plasma bushobora kandi kugabanya ubushyuhe bwa substrate mu gihe cyo gukora filime, kandi filime ya ITO yakuwe mu gitereko ifite imikorere myiza. Uburyo bufashijwe na filime ya ITO yateguwe na S. Laux et al. ni nke cyane, 5 * 10-”Ωcm, kandi ubushobozi bwo kwinjiza urumuri kuri 550nm buri munsi ya 5%, kandi ubushobozi bwo kwirinda kwa firime n'umurongo w'urumuri nabyo bihinduka bitewe no guhindura umuvuduko wa ogisijeni mu gihe cyo kuyishyiramo.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua