Chiyambi cha Kuphimba kwa ITO

Indium tin oxide (Indium Tin Oxide, yotchedwa ITO) ndi mpata waukulu wa band, zinthu za semiconductor zokhala ndi n-type zambiri, zomwe zimatumiza kuwala kwambiri komanso zimakhala ndi mphamvu zochepa zopewera kuzizira, motero zimagwiritsidwa ntchito kwambiri m'maselo a dzuwa, ziwonetsero za flat panel, mawindo a electrochromic, inorganic ndi organic thin-film electroluminescence, laser diodes ndi ultraviolet detectors ndi zipangizo zina za photovoltaic, ndi zina zotero. Pali njira zambiri zokonzekera mafilimu a ITO, kuphatikizapo pulsed laser deposition, sputtering, chemical vapor deposition, spray thermal decomposition, sol-gel, evaporation, ndi zina zotero. Pakati pa njira yotulutsira kuzizira, yomwe imagwiritsidwa ntchito kwambiri ndi evaporation ya electron beam.

Pali njira zambiri zokonzekera filimu ya ITO, kuphatikizapo pulsed laser deposition, sputtering, chemical vapor deposition, spray pyrolysis, sol-gel, evaporation ndi zina zotero, zomwe njira yofala kwambiri yogwiritsira ntchito evaporation ndi evaporation ya electron beam. Kukonzekera evaporation kwa mafilimu a ITO nthawi zambiri kumakhala ndi njira ziwiri: imodzi ndi kugwiritsa ntchito high-purity In, Sn alloy ngati gwero, mumlengalenga wa okosijeni kuti evaporation ichitike; yachiwiri ndi kugwiritsa ntchito high-purity In2O3:, SnO2 mixture ngati gwero la evaporation mwachindunji. Kuti filimuyi ikhale ndi transmittance yayikulu komanso resistivity yochepa, nthawi zambiri imafunika kutentha kwapamwamba kapena kufunikira kwa annealing yotsatira ya filimuyi. HR Fallah et al. adagwiritsa ntchito njira ya evaporation ya electron beam pa kutentha kochepa kuti aike mafilimu opyapyala a ITO, kuti aphunzire momwe kuchuluka kwa deposition, kutentha kwa annealing ndi magawo ena a process pa kapangidwe ka filimuyi, mphamvu zamagetsi ndi kuwala zimakhudzira evaporation ndikuchepetsa resistivity ya mafilimu omwe amakula kutentha kochepa. Kutumiza kwa kuwala kooneka ndi kopitilira 92%, ndipo kukana ndi 7X10-4Ωcm. Adasunga mafilimu a ITO omwe amakula kutentha kwa chipinda pa 350~550℃, ndipo adapeza kuti kutentha kwa annealing kuli kokwera, mphamvu ya kristalo ya mafilimu a ITO imakhala yabwino. Kutumiza kwa kuwala kooneka kwa mafilimu pambuyo pa annealing pa 550℃ ndi 93%, ndipo kukula kwa tinthu tating'onoting'ono ndi pafupifupi 37nm. Njira yothandizidwa ndi plasma ingachepetsenso kutentha kwa substrate panthawi yopanga filimu, chomwe ndi chinthu chofunikira kwambiri pakupanga filimuyi, ndipo kristalo ndiyenso yofunika kwambiri. Njira yothandizidwa ndi plasma ingachepetsenso kutentha kwa substrate panthawi yopanga filimu, ndipo filimu ya ITO yomwe idapezeka kuchokera ku deposition ili ndi magwiridwe antchito abwino. Kukana kwa filimu ya ITO yokonzedwa ndi S. Laux et al. ndi yotsika kwambiri, 5*10-”Ωcm, ndipo kuyamwa kwa kuwala pa 550nm ndi kochepera 5%, ndipo mphamvu yotsutsa filimuyo ndi bandwidth yowunikira zimasinthidwanso posintha kuthamanga kwa okosijeni panthawi yoyika.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua