Inzira ya cathode yuzuye

Inzira ya holho cathode ion itwikiriye nuburyo bukurikira:

1 、 Shyira ingobyi ya Chin mu gusenyuka.

2 、 Gushiraho urupapuro.

3 、 Nyuma yo kwimuka kuri 5 × 10-3Pa, gaze ya argon yinjizwa mu cyumba cyo gutwikamo ivuye mu muyoboro wa feza, kandi urwego rwa vacuum rugera kuri 100Pa.

4 、 Koresha imbaraga zibogamye.

5. glow gusohora impinduka zitunguranye kugirango zisohore arc, Umuvuduko ni 40 ~ 70V, Ibiriho ni 80 ~ 300A.Ubushyuhe bwumuringa wa siliveri bugera hejuru ya 2300K, Incandescent, Bitanga umuyoboro mwinshi wa electron arc kuva muri tube, hanyuma ukarasa kuri anode.

6 Guhindura urwego rwa vacuum.Urwego rwa vacuum rwo gusohora urumuri ruva mu mbunda ya cathode yuzuye ni Pa 100, Kandi urwego rwa vacuum rwo gutwikira ni 8 × 10-1 ~ 2Pa. Kubera iyo mpamvu, Nyuma yo gutwika isohoka rya arc, Mugabanye gaze ya argon yinjira vuba bishoboka.

7 、 Titanium yashizwemo ibice fatizo.Ibikoresho bya elegitoronike byinjira mu cyuma cya Chin cyaguye mu buryo budasanzwe, Guhindura ingufu za kinetic ku mbaraga zumuriro, Guhindura ibyuma bya Chin ukoresheje ubushyuhe, atome za Vapor zigera ku kazi kugirango zikore firime ya titanium.

8 、 Gushyira TiN. Gazi ya azote itangwa mucyumba cyo gutwikamo, gaze ya azote na atome ziva mu kirere zinjizwa muri azote na ioni ya titanium.Ku buryo bukomeye, Birashoboka cyane ko impanuka zidahwitse za atome ziva mu kirere hamwe n’inzira zuzuye za electroni nkeya, reaction ya Titanium iri hejuru ya 20% ~ 40%. azote, Kubitsa kugirango ubone nitride mantle ya firime.Imbunda ya cathode yuzuye ni isoko ya vaporisation ， Iyindi soko ya ionisation.Mu gihe cyo gutwikira, Umuyoboro wa elegitoroniki ya elegitoroniki ukikije ingenzi nawo ugomba guhindurwa, Wibande urumuri rwa electron rwagati rwaguye, Gutyo, ubwinshi bwimbaraga za electron ziyongera.

9.