ITO Iriburiro

Indium tin oxyde (Indium Tin Oxide, bita ITO) ni icyuho kinini, ibikoresho byinshi byifashishwa mu bwoko bwa semiconductor, bifite urumuri rwinshi rugaragara kandi rukaba rudashobora kwihanganira, bityo rukaba rukoreshwa cyane mu mirasire y'izuba, icyerekezo cyerekana amashanyarazi, idirishya rya electrochromic, uburyo butemewe na firime ya elegitoronike, ibikoresho bya disiki ya ultroviolet. pulsed laser deposition, sputtering, imyuka ya chimique, gutera imiti yangirika, sol-gel, guhumeka, nibindi.

Hariho uburyo bwinshi bwo gutegura firime ya ITO, harimo gushiramo laser laser, sputtering, imyuka ya chimique, spray pyrolysis, sol-gel, guhumeka nibindi, muribwo buryo bukoreshwa cyane mubyuka ni uguhumeka kumashanyarazi. Gutegura imyuka ya firime ya ITO mubusanzwe bifite inzira ebyiri: imwe ni ugukoresha isuku nyinshi Muri, Sn alloy nkibikoresho nkomoko, mukirere cya ogisijeni kugirango habeho guhinduka; icya kabiri ni ugukoresha ubuziranenge-In2O3:, SnO2 ivanze nkibikoresho nkomoko yo guhumeka neza. Kugirango ukore firime ifite itumanaho ryinshi kandi irwanya ubukana, mubisanzwe bisaba ubushyuhe bwo hejuru bwubutaka cyangwa gukenera gukurikira firime. HR Fallah n'abandi. yakoresheje uburyo bwa elegitoronike yumuriro mubushyuhe buke kugirango abike ITO yoroheje, kugirango yige ingaruka zumubyigano, ubushyuhe bwa annealing nibindi bipimo byimiterere kumiterere ya firime, amashanyarazi na optique. Bagaragaje ko kugabanya igipimo cyo kubitsa bishobora kongera itumanaho no kugabanya ubukana bwa firime ikura ubushyuhe buke. Ihererekanyabubasha ryurumuri rugaragara rirenze 92%, naho kurwanya ni 7X10-4Ωcm. bahujije firime ya ITO ikura mubushyuhe bwicyumba kuri 350 ~ 550 and, basanga uko ubushyuhe bwa annealing buri hejuru, niko umutungo wa kristalline ya firime ITO. urumuri rugaragara rwohereza ama firime nyuma yo gufatirwa kuri 550 ℃ ni 93%, naho ingano zingana na 37nm. uburyo bwafashijwe na plasma burashobora kandi kugabanya ubushyuhe bwa substrate mugihe cyo gukora firime, nicyo kintu cyingenzi mugushinga firime, kandi kristu nayo ni ngombwa cyane. Uburyo bufashijwe na plasma burashobora kandi kugabanya ubushyuhe bwa substrate mugihe cyo gukora firime, kandi firime ITO yakuwe mububiko ifite imikorere myiza. kurwanya firime ya ITO yateguwe na S. Laux n'abandi. ni hasi cyane, 5 * 10- ”Ωcm, kandi kwinjiza urumuri kuri 550nm ntibiri munsi ya 5%, kandi kurwanya firime hamwe numuyoboro wa optique nabyo birahinduka muguhindura umuvuduko wa ogisijeni mugihe cyoherejwe.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua