Njira yopangira zokutira za cathode ion ndi motere:
1, Ikani ma Chin ingots pakugwa.
2, Kuyika workpiece.
3, Pambuyo posamukira ku 5 × 10-3Pa, mpweya wa argon umalowetsedwa m'chipinda chotchingira kuchokera ku chubu lasiliva, ndipo mulingo wakupuma uli mozungulira 100Pa.
4, Yatsani mphamvu yokondera.
5, Mutayatsa mphamvu ya arc kuyatsa kutulutsa kwa dzenje la cathode. Kutulutsa kowala kumapangidwa mu chubu la batani, Kutulutsa voteji ndi 800 ~ 1000V, The arc-rasing current ndi 30 ~ 50A. kuphulitsa khoma la chubu chapamwamba,Pangani chubu chachubu kutenthetsa kwambiri mpaka kutulutsa kwa ma elekitironi, njira yotulutsira kuchokera pakuyatsa kowala kusintha kwadzidzidzi kutulutsa kwa arc,Voltage ndi 40 ~ 70V,Pakali pano ndi 80 ~ 300A.Kutentha kwa chubu cha Silver kumafika pamwamba pa 2300K,Incandescent mtsinje wa machubu,Emits mtsinje wokwera, ndi kuwombera kwa ma elekitironi anode.
6, Kusintha kwa vakuyumu mlingo. The zingalowe mlingo kwa kuwala kukhetsa ku dzenje cathode mfuti ndi za 100 Pa, Ndipo zingalowe digiri ❖ kuyanika ndi 8 × 10-1 ~ 2Pa. Choncho, pambuyo poyatsira arc kumaliseche, Kuchepetsa ukubwera argon mpweya posachedwapa kwa vacuum yoyenera, Kusintha kosiyanasiyana.
7, Titaniyamu yokutidwa m'munsi layer.Electron kuyenda pa anodically anakomoka Chin zitsulo ingot, Kutembenuka kwa mphamvu kinetic kuti matenthedwe mphamvu, Evaporation wa Chin zitsulo ndi Kutentha, nthunzi maatomu kufika workpiece kupanga titaniyamu filimu.
8, Kuyika kwa TiN. Nayitrogeni mpweya amaperekedwa kwa ❖ kuyanika chipinda, mpweya wa nayitrogeni ndi maatomu chamunthuyo ndi ionized mu asafe ndi titaniyamu ayoni. Pamwamba pa crucible, Apamwamba Mwina inelastic kugunda kwa titaniyamu nthunzi maatomu ndi wandiweyani mitsinje ya otsika mphamvu asciation zitsulo dissos 20% ~ 40%., Ma ion titaniyamu amatha kuchitapo kanthu ndi zomwe zimachitika ndi nayitrogeni wa gasi, malo oti apeze filimu ya nitride mantle. kachulukidwe wa ma elekitironi otaya amawonjezeka.
9, Mphamvu Off. Pambuyo filimu makulidwe kufika anakonzeratu filimu makulidwe, Zimitseni arc mphamvu, Kukondera magetsi ndi kotunga mpweya.
Nthawi yotumiza: Jul-08-2023