Indium malata okusayidi (Indium malata okusayidi, amatchedwa ITO) ndi lonse gulu kusiyana, kwambiri doped n-mtundu semiconductor zipangizo, ndi mkulu looneka kuwala transmittance ndi makhalidwe otsika resistivity, motero chimagwiritsidwa ntchito mu maselo dzuwa, lathyathyathya gulu anasonyeza, electrochromic mazenera, zosawerengeka ndi organic woonda-filimu electroluminedescence ndi zipangizo ultraviolet divoltaodescence ndi ultraviolet diagnostics etc. njira zambiri zokonzera mafilimu a ITO, kuphatikizapo pulsed laser deposition, sputtering, chemical vapor deposition, spray thermal decomposition, sol-gel, evaporation, etc. Pakati pa njira ya evaporation, yomwe imagwiritsidwa ntchito kwambiri ndi electron mtengo evaporation.
Pali njira zambiri zokonzekera filimu ya ITO, kuphatikizapo pulsed laser deposition, sputtering, chemical vapor deposition, spray pyrolysis, sol-gel, evaporation ndi zina zotero, zomwe njira zomwe zimagwiritsidwa ntchito kwambiri ndi evaporation ndi electron mtengo evaporation. Kukonzekera kwa evaporation kwa mafilimu a ITO nthawi zambiri kumakhala ndi njira ziwiri: imodzi ndiyo kugwiritsa ntchito chiyero chapamwamba Mu, Sn alloy monga gwero la zinthu, mumlengalenga wa okosijeni wa zomwe zimatuluka; chachiwiri ndi kugwiritsa ntchito chiyero cha In2O3 :, SnO2 osakaniza monga gwero la zinthu za evaporation mwachindunji. Kuti filimuyo ikhale ndi transmittance yapamwamba komanso yotsika kwambiri, nthawi zambiri imafunika kutentha kwa gawo lapansi kapena kufunika kowonjezera filimuyo. HR Fallah et al. ntchito elekitironi mtengo evaporation njira pa kutentha otsika kuyika ITO mafilimu woonda, kuphunzira mmene mlingo mafunsidwe, annealing kutentha ndi zina ndondomeko magawo pa kapangidwe filimu, magetsi ndi kuwala katundu. Ananenanso kuti kutsitsa kuchuluka kwa ma deposition kumatha kukulitsa kufalikira ndikuchepetsa kukhazikika kwa makanema omwe amakula pang'onopang'ono. Kutumiza kwa kuwala kowoneka kumaposa 92%, ndipo resistivity ndi 7X10-4Ωcm. adasokoneza mafilimu a ITO omwe amakula kutentha kwapakati pa 350 ~ 550 ℃, ndipo adapeza kuti kutentha kwa annealing kumakhala kokwera kwambiri, ndi bwino kuti mafilimu a crystalline apangidwe bwino. Kuwala kowoneka kwa mafilimu pambuyo pa 550 ℃ ndi 93%, ndipo kukula kwake ndi pafupifupi 37nm. njira yothandizira plasma imathanso kuchepetsa kutentha kwa gawo lapansi panthawi yopanga filimu, yomwe ndi yofunika kwambiri pakupanga filimuyo, komanso crystallinity ndi yofunika kwambiri. Njira yothandizidwa ndi plasma imathanso kuchepetsa kutentha kwa gawo lapansi panthawi yopanga filimu, ndipo filimu ya ITO yomwe imapezeka kuchokera ku deposition imakhala ndi ntchito yabwino. resistivity ya filimu ya ITO yokonzedwa ndi S. Laux et al. ndi otsika kwambiri, 5 * 10- ”Ωcm, ndipo kuyamwa kwa kuwala pa 550nm ndi osachepera 5%, ndipo resistivity ya filimuyo ndi bandwidth optical amasinthidwanso mwa kusintha mpweya wa oxygen panthawi yoyika.
-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua
Nthawi yotumiza: Mar-23-2024