Te tukanga o te paninga katote cathode hollow

Ko te tukanga o te paninga katote hollow cathode e whai ake nei:

1, Kuhua nga ingots Chin ki te tiango.

2, Whakapuru i te mea mahi.

3、I muri i te rerenga ki te 5 × 10-3Pa, ka whakauruhia te hau argon ki roto i te ruma paninga mai i te ngongo hiriwa, a ko te taumata korehau kei te 100Pa.

4, Whakakāhia te mana rītaha.

5、I muri i te hurihanga i te mana arc ki te mura i te rere o te cathode hollow.Ko te rere o te mura ka puta i roto i te ngongo paatene,Ko te ngaohiko tuku he 800~1000V,Ko te 30~50A te hiko o te arc-ara. o te ngongo hiranga, Kia tere te whakamahana o te pakitara ngongo ki te tukunga o te rere irahiko, te aratau tuku mai i te rere o te kanapa te huringa ohorere ki te rere arc, Ko te ngaohiko he 40~70V, Ko te 80~300A.Ko te pāmahana ngongo hiriwa ka eke ki runga ake i te 2300K,Ko te maramara o te hiko o te ngongo ki runga ake i te 2300K.

6、Whakatikanga o te taumata korehau.Ko te taumata korehau mo te rere o te mura mai i te pu cathode hollow he tata ki te 100 Pa,A ko te tohu korehau o te paninga ko te 8×10-1~2Pa.Na reira, I muri i te mura o te rere arc,Whakaitihia te hau argon taumai i te wa e taea ai,Whakaritea te awhe e tika ana mo te awhe e tika ana.

7、Titanium whakakikoruatia paparanga turanga.Ka rere irahiko ki runga anodically tiango ingot konganuku Chin,Te hurihanga o te pūngao neke ki te pūngao waiariki,Te whakaetonga o te konganuku Chin i whakawera,Ngota ngota ka tae ki te mea mahi ki te hanga i te kiriata Titanium.

8、Deposition o TiN.Nitrogen hau ka tukuna ki te ruuma paninga,Nitrogen hau me ngota ngota kua katote ki te hauota me te titanium ions.Above te crucible,Hinga ake te tūponotanga o tukinga inelastic o Titanium kohu ngota ki te awa mātotoru o iti-pūngao irahiko,Ko te reiti whakarewatanga he ~40 02% te whakarewatanga. ka kaha ake te tauhohenga matū ki te hauota tauhohenga hau, Whakapae ki te whiwhi i te paparanga kiriata koroka nitride.Ko te pu cathode hollow he puna vaporization ，Tetahi atu puna o te ionization.I te wa o te paninga,Me whakatika ano hoki te naianei o te porowhita hiko huri noa i te ipu, Arotahi te kurupae irahiko ki te pokapū o te tiango, ka nui haere te hiko o te hiko.

9、Power Off.After tae te matotoru kiriata ki te matotoru kiriata whakaritea o mua, Whakawetohia arc supply mana、Bias supply mana me te supply rangi.