Usoro nke oghere cathode ion mkpuchi

Usoro mkpuchi oghere cathode ion bụ nke a:

1. Tinye Chin ingots na ọdịda.

2. Ịkwalite workpiece.

3, Mgbe evacuating ka 5 × 10-3Pa, argon gas na-ẹkenam n'ime mkpuchi ụlọ si ọlaọcha tube, na agụụ larịị bụ gburugburu 100Pa.

4, Gbanwuo ike eleghi anya.

5, Mgbe mbịne na arc ike igbanye oghere cathode ihapu.The glow ihapu na-eme na bọtịnụ tube, Ikwasa voltaji bụ 800 ~ 1000V, The arc-ịzụlite ugbu a bụ 30 ~ 50A.Due ka oghere cathode mmetụta nke glow ihapu, High Glow ihapu ugbu njupụta nke ọlaọcha mgbidi nnukwu mgbidi, The arc-ịzụlite ugbu a bụ 30 ~ 50A. vantage tube, Mee ka mgbidi tube ngwa ngwa na-ekpo ọkụ ka ikuku nke electron na-asọpụta, ọnọdụ mgbapụ site na ọkụ ọkụ na-agbanwe na mberede na-agbanwe na nkwụsị arc, Voltage bụ 40 ~ 70V, ugbu a bụ 80 ~ 300A

6, Adjustment nke agụụ level.The agụụ larịị maka glow ihapu si oghere cathode egbe bụ banyere 100 Pa, na agụụ ogo mkpuchi bụ 8 × 10-1 ~ 2Pa.Ya mere, Mgbe mgbanye nke arc ihapu, Belata na-abata argon gas ozugbo o kwere omume, Gbanwee mkpuchi a nso adabara agụụ larịị.

7, Titanium plated isi Layer.Electron eruba jidesie anodically dara Chin metal ingot,Ntụgharị nke kinetic ike thermal ike,Evaporation nke Chin metal site kpo oku,Vapor atọm iru workpiece na-etolite a titanium film.

8, Deposition nke TiN.Nitrogen gas na-ọnọ na mkpuchi ụlọ,Nitrogen gas na evaporated atọm na-ionized n'ime nitrogen na titanium ion.Above na crucible,Elu ihe gbasara nke puru omume nke inelastic collisions nke titanium vepor atọm na ok iyi nke ala-ike electrons dị elu dị ka metal dissement. 20% ~ 40%, Titanium ion na-yikarịrị ime chemically na mmeghachi omume gas nitrogen, Deposition nweta a nitride mantle film Layer. The oghere cathode egbe bụ ma a vaporization isi iyi, ọzọ isi iyi nke ionization. N'oge mkpuchi, The ugbu a nke electromagnetic eriri igwe gburugburu crucible kwesịkwara gbanwee, Lekwasị anya n'etiti electrons ike nke electron na-eruba, T na electron na-eruba n'etiti ike nke electron na-eruba n'ime ya. na-abawanye.

9, Power Off.Mgbe film ọkpụrụkpụ esịmde predetermined film ọkpụrụkpụ, Gbanyụọ aak ike ọkọnọ, Bias ike ọkọnọ na ikuku ọkọnọ.