Txheej txheem ntawm hollow cathode ion txheej

Cov txheej txheem ntawm hollow cathode ion txheej yog raws li nram no:

1 、 Muab Chin ingots nyob rau hauv lub cev qhuav dej.

2, Mounting lub workpiece.

3 、 Tom qab kev khiav tawm mus rau 5 × 10-3Pa, argon roj tau nkag mus rau hauv txheej txheej los ntawm cov raj nyiaj, thiab lub tshuab nqus tsev yog nyob ib ncig ntawm 100Pa.

4. Tig rau lub zog tsis ncaj ncees.

5 、 Tom qab tig rau lub zog arc kom ignite lub hollow cathode paug.Lub glow paug yog generated nyob rau hauv lub khawm raj, paug voltage yog 800 ~ 1000V, lub arc-raising tam sim no yog 30 ~ 50A.Vim lub hollow cathode nyhuv ntawm glow paug, High glow density tawm ntawm cov nyiaj tam sim no. tube bombards lub phab ntsa ntawm lub vantage tube, ua rau lub raj phab ntsa sai sai sov mus rau lub emission ntawm electron txaus, lub tso tawm hom los ntawm lub glow discharge mam li nco dheev hloov mus rau arc tawm, Voltage yog 40 ~ 70V, Tam sim no yog 80 ~ 300A.Silver raj kub mus txog saum toj no 2300K, inscenced ib tug electrons tube, thiab txhaj rau lub anode.

6 、 Kev hloov kho ntawm lub tshuab nqus tsev.Lub tshuab nqus tsev theem rau glow paug los ntawm hollow cathode phom yog hais txog 100 Pa, Thiab lub tshuab nqus tsev kawm ntawv txheej yog 8 × 10-1 ~ 2Pa.Yog li ntawd, Tom qab ignition ntawm lub arc paug, txo cov khoom argon gas sai li sai tau, kho cov theem ntawm lub tshuab nqus tsev vacuum.

7, Titanium plated puag txheej.Electron ntws mus rau lub anodically tsoo Chin hlau ingot, Hloov ntawm kinetic zog rau thermal zog, Evaporation ntawm Chin hlau los ntawm cua sov, Vapor atoms ncav cuag lub workpiece los tsim ib tug titanium zaj duab xis.

8 、 Kev tso tawm ntawm TiN.Nitrogen roj yog nkag mus rau txheej txheej chamber, Nitrogen roj thiab evaporated atoms yog ionized rau hauv nitrogen thiab titanium ions.Sab saum toj ntawm lub crucible, siab dua qhov tshwm sim ntawm inelastic kev sib tsoo ntawm titanium vapor atoms nrog ntom kwj ntawm low-zog raws li cov hlau tsis muaj zog. 20% ~ 40%, Titanium ions feem ntau yuav hnov ​​​​mob chemically nrog cov tshuaj tiv thaiv roj nitrogen, Deposition kom tau ib tug nitride mantle zaj duab xis txheej.Lub hollow cathode phom yog ob qho tib si vaporization qhov chaw, Lwm qhov chaw ntawm ionization.Thaum txheej txheej, tam sim no ntawm electromagnetic coil nyob ib ncig ntawm lub crucible yuav tsum tau hloov kho, lub zog ntawm lub cev qhuav dej, Focus rau qhov chaw ntawm lub zog. ntawm electron flow yog nce.

9, Fais fab tuag.Tom qab cov zaj duab xis thickness mus txog qhov predetermined zaj duab xis thickness, tua arc fais fab mov, Bias fais fab mov thiab cua mov.