Kaʻina hana o ka hollow cathode ion coating

ʻO ke kaʻina hana o ka hollow cathode ion coating penei:

1、E hoʻokomo i nā ingots Chin i ka hiolo.

2. Ke kau nei i ka mea hana.

3、Ma hope o ka haʻalele ʻana i 5 × 10-3Pa, ua hoʻokomo ʻia ke kinoea argon i loko o ke keʻena uhi mai ka paipu kālā, a ʻo ka pae haʻahaʻa ma kahi o 100Pa.

4、E hoʻā i ka mana bias.

5、Ma hope o ka hoʻohuli ʻana i ka mana arc e hoʻā i ka hollow cathode discharge.The glow discharge is generated in the button tube, Discharge voltage is 800~1000V, The arc-raising current is 30~50A. o ka paipu vantage, E hoʻomaʻamaʻa koke i ka paia o ka paipu i ka hoʻokuʻu ʻana o ke kahe electron, ke ʻano hoʻokuʻu mai ka hoʻokuʻu ʻana o ka glow hoʻololi koke i ka hoʻokuʻu arc, Voltage he 40 ~ 70V, ʻO kēia manawa ʻo 80 ~ 300A. Piʻi ka wela o ke kālā ma luna o 2300K, Incandescent, Emits a kiʻekiʻe kiʻekiʻe o ka puʻupuʻu a hiki i ke kahawai kiʻekiʻe.

6、Ka hoʻololi ʻana i ka pae ʻāwīwī. ʻO ke kiʻekiʻe o ka māmā no ka hoʻokuʻu ʻana mai ka pu cathode puʻe ma kahi o 100 Pa, A ʻo ke degere o ka uhi ʻana he 8 × 10-1 ~ 2Pa.

7、Titanium plated base layer.Electron flow on the anodically collapsed Chin metal ingot,Conversion of kinetic energy to thermal energy,Evaporation of Chin metala ma ka wela,Vapor atoms hiki i ka workpiece e hana i ka titanium film.

8、Deposition o TiN.Nitrogen kinoea ua hoʻolako 'ia i ka uhi keʻena, Nitrogen kinoea a evaporated'Ātoma ua ionized i naikokene a me titanium ion. Ma luna o ka crucible, Higher probability o inelastic collisions o titanium mahu nā mana me ka dense kahawai o haʻahaʻa-ikena electrons, The metala dissociation 0% he 2%. ʻoi aku ka nui o ka hana kemika me ka hopena kinoea nitrogen, Deposition e loaʻa i kahi nitride mantle film layer. The hollow cathode gun he kumu vaporization ， ʻO kekahi kumu o ka ionization.During coating, Pono e hoʻoponopono ʻia ke ʻano o ka coil electromagnetic a puni ka crucible, E nānā i ka kukuna electron i ke kikowaena o ka hāʻule, hoʻonui ʻia ka mana o ka electron.

9、Power Off.After ke kiʻi mānoanoa a hiki i ka predetermined film mānoanoa, hoohuli arc mana lako、Bias mana lako a me ka ea lako.