Tsarin murfin cathode ion mai zurfi shine kamar haka:
1. Sanya Chin ingots a cikin rushewa.
2. Hauwa da workpiece.
3, Bayan evacuating zuwa 5 × 10-3Pa, argon gas da aka gabatar a cikin shafi jam'iyya daga azurfa tube, da kuma injin matakin ne a kusa da 100Pa.
4. Kunna ikon son zuciya.
5, Bayan kunna baka ikon ƙone da m cathode sallama.The haske sallama da aka generated a cikin button tube, Fitar irin ƙarfin lantarki ne 800 ~ 1000V, The baka-kõwa halin yanzu ne 30 ~ 50A.Due ga m cathode sakamako na haske sallama, High haske sallama halin yanzu yawa na azurfa bam, The Arc-kõwa halin yanzu ne 30 ~ 50A. vantage tube, Yi tube bango da sauri dumi har zuwa watsi da electron kwarara, da fitarwa yanayin daga haske sallama kwatsam canji zuwa baka sallama, Voltage ne 40 ~ 70V, A halin yanzu ne 80 ~ 300A. Azurfa tube zafin jiki kai sama da 2300K, Incandescent, Emits wani high yawa yawa, electronde harbi daga wani bututu da wutar lantarki rafi.
6. Daidaita injin level.The injin matakin ga haske sallama daga m cathode gun ne game da 100 Pa, Kuma injin digiri na shafi ne 8 × 10-1 ~ 2Pa.Saboda haka, Bayan ƙonewa na baka sallama, Rage mai shigowa argon iskar gas da wuri-wuri, Daidaita shafi zuwa kewayon dace injin shafi matakin.
7, Titanium plated tushe Layer.Electron ya kwarara uwa da anodically ruguje Chin karfe ingot, Canja wurin motsi makamashi zuwa thermal makamashi, evaporation na Chin karfe da dumama, tururi atoms kai workpiece ta samar da wani titanium fim.
8, Deposition na TiN.Nitrogen gas aka kawota zuwa shafi jam'iyya,Nitrogen gas da evaporated atoms suna ionized cikin nitrogen da titanium ions.Above da crucible,Higher yuwuwar inelastic collisions na titanium tururi atoms tare da m qarqashinsu na low-makamashi electrons kamar yadda karfe distribution. 20% ~ 40%, Titanium ions ne mafi kusantar su amsa chemically tare da dauki gas nitrogen, Deposition don samun wani nitride mantle film Layer.The m cathode gun ne duka wani vaporization source, Wani tushen ionization.During shafi, The halin yanzu na electromagnetic nada a kusa da crucible kamata kuma a gyara, Mayar da hankali da cibiyar denza da wutar lantarki, da wutar lantarki ta kwarara daga cikin electrons a rushewa. yana karuwa.
9, Power Off.Bayan da fim kauri kai predetermined film kauri, Kashe baka ikon wadata, Bias samar da wutar lantarki da iska wadata.
Lokacin aikawa: Jul-08-2023