① Ukulawulwa okuhle kanye nokuphindaphindeka kobukhulu befilimu
Ukuthi ukujiya kwefilimu kungalawulwa yini ngenani elinqunyiwe kubizwa ngokuthi ukujiya kwefilimu okungalawuleki. Ukujiya kwefilimu okudingekayo kungaphindaphindwa izikhathi eziningi, okubizwa ngokuthi ukujiya kwefilimu okungaphindaphindwa. Ngoba ugesi wokukhipha kanye nogesi oqondiwe wengubo yokuphalaza nge-vacuum kungalawulwa ngokwehlukana. Ngakho-ke, ukujiya kwefilimu ephalaza kungalawuleka, futhi ifilimu enobukhulu obunqunyiwe ingafakwa ngokuthembekile. Ngaphezu kwalokho, ugesi wokukhipha ugesi ungathola ifilimu enobukhulu obufanayo endaweni enkulu.
② Ukunamathela okuqinile phakathi kwefilimu nesisekelo
Amandla ama-athomu aqhumayo aphezulu ngama-oda angu-1-2 kunama-athomu aqhumayo. Ukuguqulwa kwamandla kwama-athomu aqhumayo anamandla aphezulu abekwe ku-substrate kuphakeme kakhulu kunalawo ama-athomu aqhumayo, okukhiqiza ukushisa okuphezulu futhi kuthuthukisa ukunamathelana phakathi kwama-athomu aqhumayo kanye ne-substrate. Ngaphezu kwalokho, amanye ama-athomu aqhumayo anamandla aphezulu akhiqiza amazinga ahlukene okujova, akha ungqimba lwe-pseudodiffusion ku-substrate. Ngaphezu kwalokho, i-substrate ihlala ihlanzwa futhi ivuselelwa esifundeni se-plasma ngesikhathi senqubo yokwakha ifilimu, esusa ama-athomu aqhumayo ngokunamathela okubuthakathaka, futhi ihlanze futhi isebenze ubuso be-substrate. Ngakho-ke, ifilimu eqhumayo inokunamathela okuqinile ku-substrate.
③ Ifilimu entsha yezinto ezibonakalayo ehlukile kweyokuhlosiwe ingalungiswa
Uma igesi esabelayo ifakwa ngesikhathi sokuphalaza ukuze ikwazi ukusabela nesithako, ifilimu entsha yezinto ezihlukile ngokuphelele kwesithako ingatholakala. Isibonelo, i-silicon isetshenziswa njengesithako sokuphalaza, futhi i-oxygen ne-argon kufakwa ekamelweni lokuphalaza ndawonye. Ngemva kokuphalaza, ifilimu yokuvikela i-SiOz ingatholakala. Kusetshenziswa i-titanium njengesithako sokuphalaza, i-nitrogen ne-argon kufakwa ekamelweni lokuphalaza ndawonye, futhi ifilimu efana ne-phase TiN efana negolide ingatholakala ngemva kokuphalaza.
④ Ubumsulwa obuphezulu kanye nekhwalithi enhle yefilimu
Njengoba kungekho ngxenye ebanjiwe kudivayisi yokulungiselela ifilimu yokubhoboza, izingxenye zezinto ezisetshenziswa njengesifudumezi ngeke zixutshwe engqimbeni yefilimu yokubhoboza. Okubi ngengubo yokubhoboza ukuthi isivinini sokwenza ifilimu sihamba kancane kunesokugqoka umhwamuko, izinga lokushisa le-substrate liphakeme, kulula ukuthintwa yigesi yokungcola, futhi isakhiwo sedivayisi siyinkimbinkimbi kakhulu.
Lesi sihloko sishicilelwe yiGuangdong Zhenhua, umkhiqizi weimishini yokumboza nge-vacuum
Isikhathi sokuthunyelwe: Mashi-09-2023