① Ulawulo oluhle kunye nokuphindaphinda kobukhulu befilimu
Ukuba ubukhulu befilimu bungalawulwa ngexabiso elimiselweyo kubizwa ngokuba bukulawulwa kobukhulu befilimu. Ubukhulu befilimu obufunekayo bunokuphindwa amaxesha amaninzi, okubizwa ngokuba bukuphindaphinda kobukhulu befilimu. Kuba umsinga wokukhupha kunye nomsinga ojoliswe kuwo wengubo yokutshiza nge-vacuum zinokulawulwa ngokwahlukeneyo. Ke ngoko, ubukhulu befilimu etshiza bunokulawulwa, kwaye ifilimu enobukhulu obumiselweyo inokubekwa ngokuthembekileyo. Ukongeza, ingubo yokutshiza inokufumana ifilimu enobukhulu obufanayo kumphezulu omkhulu.
② Ukunamathelana okuqinileyo phakathi kwefilimu kunye nesiseko
Amandla ee-athomu ezitshizayo aphezulu nge-1-2 orders ngobukhulu kunalawo ee-athomu ezitshizayo. Ukuguqulwa kwamandla ee-athomu ezitshizayo ezinamandla aphezulu ezibekwe kwi-substrate kuphezulu kakhulu kunalawo ee-athomu ezitshizayo, nto leyo evelisa ubushushu obuphezulu kwaye iphucula ukunamathelana phakathi kwee-athomu ezitshizayo kunye ne-substrate. Ukongeza, ezinye ii-athomu ezitshizayo ezinamandla aphezulu zivelisa amanqanaba ahlukeneyo okujova, zenze umaleko we-pseudodiffusion kwi-substrate. Ukongeza, i-substrate ihlala icocwa kwaye ivuselelwa kummandla we-plasma ngexesha lenkqubo yokwenza ifilimu, esusa ii-athomu ezitshizayo ngokunamathela okubuthathaka, kwaye icoce kwaye isebenze umphezulu we-substrate. Ke ngoko, ifilimu etshizayo inamathele kakhulu kwi-substrate.
③ Ifilimu entsha yezinto ezahlukeneyo kwithagethi ingalungiselelwa
Ukuba igesi ephendulayo ingeniswa ngexesha lokutshiza ukuze ikwazi ukumelana nenjongo, ifilimu entsha yezinto eyahlukileyo ngokupheleleyo kuleyo ijoliswe kuyo ingafunyanwa. Umzekelo, isilicon isetyenziswa njengethagethi yokutshiza, kwaye ioksijini kunye ne-argon zifakwa kwigumbi lokutshiza kunye. Emva kokutshiza, ifilimu yokukhusela i-SiOz ingafunyanwa. Ukusebenzisa i-titanium njengethagethi yokutshiza, i-nitrogen kunye ne-argon zifakwa kwigumbi lokutshiza kunye, kwaye ifilimu efana negolide yesigaba se-TiN ingafunyanwa emva kokutshiza.
④ Ubunyulu obuphezulu kunye nomgangatho olungileyo wefilimu
Ekubeni kungekho nxalenye yokunyibilika kwisixhobo sokulungiselela ifilimu yokutshiza, izinto zesixhobo sokutshiza esitshiza aziyi kuxutywa kumaleko wefilimu yokutshiza. Izinto ezingalunganga zokutshiza kukuba isantya sokwenza ifilimu sicotha kuneso sokutshiza, ubushushu be-substrate buphezulu, kulula ukuchaphazeleka yigesi yokungcola, kwaye ulwakhiwo lwesixhobo luyinkimbinkimbi ngakumbi.
Eli nqaku lipapashwe nguGuangdong Zhenhua, umenzi weizixhobo zokugquma nge-vacuum
Ixesha lokuthumela: Matshi-09-2023