① Kugona kudzora uye kudzokorora kweukobvu hwefirimu
Kuti ukobvu hwefirimu hunogona kudzorwa nemutengo wakatarwa kunonzi kugona kudzora ukobvu hwefirimu. Ukobvu hwefirimu hunodiwa hunogona kudzokororwa kakawanda, hunonzi kugona kudzokorora ukobvu hwefirimu. Nekuti simba rekuburitsa magetsi nemagetsi evacuum sputtering coating zvinogona kudzorwa zvakasiyana. Nokudaro, ukobvu hwefirimu rakaputirwa hunogona kudzorwa, uye firimu rine ukobvu hwakatarwa hunogona kuiswa zvakavimbika. Pamusoro pezvo, kupfeka kwesputter kunogona kuwana firimu rine ukobvu hwakafanana pamusoro penzvimbo hombe.
② Kubatana kwakasimba pakati pefirimu ne substrate
Simba remaatomu akapfachuka rakakwirira ne1-2 orders yehukuru kupfuura remaatomu akapfachuka. Kushandurwa kwesimba remaatomu akapfachuka ane simba guru akaiswa pa substrate kwakakwira zvikuru kupfuura kwemaatomu akapfachuka, izvo zvinogadzira kupisa kwakanyanya uye zvinowedzera kubatana pakati pemaatomu akapfachuka ne substrate. Pamusoro pezvo, mamwe maatomu akapfachuka ane simba guru anogadzira madhigirii akasiyana ejekiseni, zvichigadzira pseudodiffusion layer pa substrate. Pamusoro pezvo, substrate inogara ichicheneswa uye ichishandiswa munzvimbo yeplasma panguva yekugadzira firimu, iyo inobvisa maatomu akapfachuka nekunamatira kusina kusimba, uye inochenesa uye inomutsa pamusoro pe substrate. Naizvozvo, firimu rakapfachuka rine kubatana kwakasimba kune substrate.
③ Firimu idzva rakasiyana nerakagadzirirwa rinogona kugadzirwa
Kana gasi rinoita reactive rikaunzwa panguva yekusputter kuti riite reactive nechinangwa, firimu idzva rakasiyana zvachose nechainenge yatarwa rinogona kuwanikwa. Semuenzaniso, silicon inoshandiswa sechinangwa chekusputter, uye okisijeni neargon zvinoiswa mukamuri rekusputter pamwe chete. Mushure mekusputter, firimu reSiOz insulating rinogona kuwanikwa. Uchishandisa titanium sechinangwa chekusputter, nitrogen neargon zvinoiswa mukamuri rekusputter pamwe chete, uye firimu rakafanana neTiN gold rinogona kuwanikwa mushure mekusputter.
④ Kuchena kwakanyanya uye mhando yakanaka yefirimu
Sezvo pasina chinhu chinobatika mumudziyo wekugadzira firimu rekuputira, zvikamu zvechinhu chinobatika chekuputira hazvizosanganiswi mufirimu rekuputira. Zvakashata zvekuputira firimu ndezvekuti kumhanya kwekugadzira firimu kunononoka kupfuura kwekuputira, tembiricha yesubstrate yakakwira, zviri nyore kukanganiswa negasi rekusvibiswa, uye chimiro chemudziyo chakaoma kunzwisisa.
Chinyorwa ichi chakaburitswa neGuangdong Zhenhua, kambani inogadziramidziyo yekunamira ye vacuum
Nguva yekutumira: Kurume-09-2023