Ibiranga filime zo gusigaho irangi

① Uburyo bwiza bwo kugenzura no gusubiramo ubugari bwa filime

Kuba ubugari bwa firime bushobora kugenzurwa ku giciro cyagenwe byitwa uburyo bwo kugenzura ubugari bwa firime. Ubugari bwa firime bukenewe bushobora gusubirwamo inshuro nyinshi, ari byo byitwa uburyo bwo gusubiramo ubugari bwa firime. Kubera ko umuyoboro w'amashanyarazi n'umuyoboro w'amashanyarazi ukoreshwa mu gutwikira firime bishobora kugenzurwa ukwabyo. Kubwibyo, ubugari bwa firime ikoreshwa mu gutwika buragenzurwa, kandi firime ifite ubugari bwagenwe ishobora gushyirwa mu buryo bwizewe. Byongeye kandi, uburyo bwo gutwika firime bushobora kubona firime ifite ubugari bungana ku buso bunini.

② Gufatana gukomeye hagati ya firime n'ubutaka

Ingufu za atome zirimo amazi ziruta cyane iza atome zirimo amazi. Ingufu zihinduka za atome zirimo amazi zirimo amazi menshi zishyirwa kuri substrate ni nyinshi cyane kuruta iza atome zirimo amazi, ibyo bigatuma ubushyuhe bwinshi burushaho kwiyongera kandi bukongera ubufatanye hagati ya atome zirimo amazi n'substrate. Byongeye kandi, atome zimwe na zimwe zirimo amazi menshi zirimo amazi menshi zikora urwego rutandukanye rwo gutera, zigakora urwego rwa pseudodiffusion kuri substrate. Byongeye kandi, substrate ihora isukurwa kandi igakoreshwa mu gace ka plasma mu gihe cyo gukora filime, ibyo bikuraho atome zirimo amazi zirimo amazi menshi, kandi bigasukura kandi bigakoresha ubuso bwa substrate. Kubwibyo, filime irimo amazi ifite ubufatanye bukomeye na substrate.

③ Filimi nshya itandukanye n'iyo ku ntego ishobora gutegurwa

Iyo umwuka urimo gukora ukoresheje umwuka utuma ukorana n'intego, hashobora kuboneka firime nshya itandukanye rwose n'intego. Urugero, silikoni ikoreshwa nk'intego yo guterura, kandi ogisijeni na argon bishyirwa mu cyumba cy'imyanda hamwe. Nyuma yo guterura, hashobora kuboneka firime ya SiOz ikingira. Hakoreshejwe titaniyumu nk'intego yo guterura, azote na argon bishyirwa mu cyumba cy'imyanda hamwe, kandi firime isa na zahabu ya phase TiN ishobora kuboneka nyuma yo guterura.

④ Ifite ubuziranenge bwinshi n'ubwiza bwiza bwa filime

Kubera ko nta gice cy’icyuma gishyushya kiri mu gikoresho gitegura firime yo gusukamo amazi, ibice by’icyuma gishyushya amazi ntibivangwa mu gikoresho gishyushya amazi. Ingaruka mbi zo gusukamo amazi ni uko umuvuduko wo gukora firime ugenda buhoro ugereranije n’uwo gusukamo amazi, ubushyuhe bw’ubutaka buri hejuru, byoroshye kugira ingaruka ku mwuka mubi, kandi imiterere y’igikoresho irushaho kuba igoye.

Iyi nkuru yasohotse na Guangdong Zhenhua, uruganda rukoraibikoresho byo gusiga irangi ry'umwuka