Uma kuqhathaniswa nezinye ubuchwepheshe bokumboza, ukumboza nge-magnetron sputtering kubonakaliswa yizici ezilandelayo: amapharamitha okusebenza anobubanzi obukhulu bokulungiswa kwesivinini sokufakwa kwe-coating kanye nobukhulu (isimo sendawo embozwe) kungalawulwa kalula, futhi akukho mkhawulo womklamo ku-geometry yethagethi ye-magnetron ukuqinisekisa ukufana kwe-coating; akukho nkinga yezinhlayiya zamaconsi kungqimba lwefilimu; cishe zonke izinsimbi, ama-alloy, kanye ne-ceramics kungenziwa kube izinto eziqondiwe; futhi izinto eziqondiwe zingakhiqizwa yi-DC noma i-RF magnetron sputtering, engakhiqiza ukumboza ngensimbi emsulwa noma i-alloy enesilinganiso esiqondile, kanye namafilimu asabelayo ensimbi ane-gas participation. Ngokumboza nge-DC noma i-RF, kungenzeka ukukhiqiza ukumboza ngensimbi emsulwa noma i-alloy enezilinganiso eziqondile nezihlala njalo, kanye namafilimu asabelayo ensimbi ane-gas participation, ukuze kuhlangatshezwane nezidingo zokwehlukahlukana kwefilimu encane kanye nokunemba okuphezulu. Amapharamitha enqubo ajwayelekile wokumboza nge-magnetron sputtering yilezi: ingcindezi yokusebenza engu-0.1Pa; i-voltage eqondiwe engu-300~700V; ukuminyana kwamandla okuqondiwe okungu-1~36W/cm².
Izici ezithile zokusebenzisa i-magnetron sputtering yilezi:
(1) Izinga eliphezulu lokufakwa. Ngenxa yokusetshenziswa kwama-electrode e-magnetron, kungatholakala ugesi omkhulu kakhulu we-ion oqondiwe, ngakho-ke izinga lokuchoboza i-sputter ebusweni obuqondiwe kanye nezinga lokufakwa kwefilimu ebusweni be-substrate kokubili kuphakeme kakhulu.
(2) Ukusebenza kahle kwamandla aphezulu. Amathuba okushayisana kwama-electron anamandla aphansi nama-athomu egesi aphezulu, ngakho-ke izinga lokuhlukana kwegesi liyanda kakhulu. Ngakho-ke, ukuvimba kwegesi ekhishwayo (noma i-plasma) kuncishisiwe kakhulu. Ngakho-ke, ukuchitheka kwe-DC magnetron uma kuqhathaniswa nokuchitheka kwe-DC dipole, noma ngabe ingcindezi yokusebenza incishisiwe kusuka ku-1~10Pa kuya ku-10-210-1Pa i-voltage yokuchitheka nayo incishisiwe kusuka kuzinkulungwane zama-volt kuya kumakhulu ama-volt, ukusebenza kahle kokuchitheka kanye nezinga lokufakwa kukhushulwa ngama-oda amakhulu.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Disemba-01-2023