Ugereranyije n'izindi koranabuhanga zo gusiga, gusiga magnetron sputtering kurangwa n'ibi bikurikira: ibipimo bikora bifite uburyo bwinshi bwo guhindura umuvuduko wo gushyiramo irangi kandi ubugari (imiterere y'agace gatwikiriwe) bishobora kugenzurwa byoroshye, kandi nta mbogamizi ku miterere y'icyerekezo cya magnetron kugira ngo harebwe ko irangi ringana; nta kibazo cy'uduce duto tw'amazi mu gice cya filime; hafi ya byose byuma, alloys, na ceramics bishobora gukorwamo ibikoresho by'icyerekezo; kandi ibikoresho by'icyerekezo bishobora gukorwa na DC cyangwa RF magnetron sputtering, ishobora gukora irangi ry'icyuma cyangwa alloy rifite igipimo nyacyo, hamwe na filime zikora neza hamwe na gaze. Binyuze muri DC cyangwa RF sputtering, birashoboka gukora irangi ry'icyuma cyangwa alloy rifite igipimo nyacyo kandi gihoraho, hamwe na filime zikora neza hamwe na gaze, kugira ngo huzuzwe ibisabwa byo gutandukanya filime nto n'ubuziranenge bwo hejuru. Ibipimo bisanzwe by'imikorere yo gusiga magnetron sputtering ni: umuvuduko w'akazi wa 0.1Pa; voltage ya 300 ~ 700V; ubucucike bw'imbaraga za 1 ~ 36W / cm².
Ibiranga byihariye bya magnetron sputtering ni ibi bikurikira:
(1) Igipimo cyo hejuru cyo gushyiramo. Kubera ikoreshwa rya electrodes za magnetron, umuyoboro munini cyane wa ion uturuka ku ntego ushobora kuboneka, bityo igipimo cyo gusohora sputter ku buso bw'intego n'igipimo cyo gushyiramo filime ku buso bw'inyubako byombi biri hejuru cyane.
(2) Ingufu nyinshi. Amahirwe yo gukubitana kwa electron nke na atome za gaze ni menshi, bityo igipimo cyo kwitandukanya kwa gaze kiriyongera cyane. Bityo, impedance ya gaze isohoka (cyangwa plasma) iragabanuka cyane. Kubwibyo, gushonga kwa magnetron ya DC ugereranije no gushonga kwa dipole ya DC, nubwo umuvuduko w'akazi wagabanuka kuva kuri 1 ~ 10Pa kugera kuri 10-210-1Pa na wo wagabanuka kuva kuri volts ibihumbi kugera kuri volts amagana, imikorere yo gushonga no gushyiramo umwuka byiyongera bitewe n'ingano y'ibintu.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ukuboza-01-2023